Chinese Optics Letters, Volume. 13, Issue 4, 041102(2015)
Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics
Fig. 2. Sub-aperture (a) sampling and (b) stitching with coordinate error.
Fig. 4. Edge images that are sampled at high magnification; (a) in-focus edge image; (b) estimated boundary line of a defocus edge image.
Fig. 5. Cropped edge images the focus curves; (a) cropped edge images that are sampled by the step length of 50 μm; (b) fitted focus curves of edge images.
Fig. 6. Spatial relation model of defocus depths and leveling mechanism.
Fig. 7. Sub-apertures (a)
Fig. 8. Sub-aperture array stitching result,
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Pin Cao, Yongying Yang, Chen Li, Huiting Chai, Yang Li, Shibin Xie, Dong Liu, "Alignment methods for micron-scale surface defects automatic evaluation of large-aperture fine optics," Chin. Opt. Lett. 13, 041102 (2015)
Category: Imaging Systems
Received: Nov. 27, 2014
Accepted: Feb. 12, 2015
Published Online: Sep. 21, 2018
The Author Email: Yongying Yang (chuyyy@zju.edu.cn)