Chinese Optics, Volume. 17, Issue 4, 852(2024)

Vortex phase-shifting digital holography for micro-optical element surface topography measurment

Yi-meng XUE1,2, Bing-cai LIU1,2, Yong-qiang PAN1,2、*, Xin-meng FANG1,2, Ai-ling TIAN1,2, and Rui-xuan ZHANG1,2
Author Affiliations
  • 1School of Opto-Electronic Engineering, Xi’an Technological University, Xi’an 710021, China
  • 2Shaanxi Province Key Laboratory of Thin Film Technology and Optical Testing, Xi’an Technological University, Xi’an 710021, China
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    References(27)

    [18] SHEN Y J, WANG X J, XIE ZH W et al. Optical vortices 30 years on: OAM manipulation from topological charge to multiple singularities[J]. Light:Science & Applications, 8, 90(2019).

    [24] WANG W P, HUANG S J, CHEN Y et al. Three-dimensional refractive index measurement of special optical fiber based on optical vortex phase-shifting digital holographic microscopy[J]. Optical Engineering, 58, 034108(2019).

    [25] ZHAO D E, JIA CH ZH, MA Y Y et al. High-accuracy surface profile measurement based on the vortex phase-shifting interferometry[J]. International Journal of Optics, 2021, 6937072(2021).

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    Yi-meng XUE, Bing-cai LIU, Yong-qiang PAN, Xin-meng FANG, Ai-ling TIAN, Rui-xuan ZHANG. Vortex phase-shifting digital holography for micro-optical element surface topography measurment[J]. Chinese Optics, 2024, 17(4): 852

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    Paper Information

    Received: Oct. 11, 2023

    Accepted: --

    Published Online: Aug. 9, 2024

    The Author Email:

    DOI:10.37188/CO.2023-0180

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