Chinese Optics, Volume. 17, Issue 4, 852(2024)
Vortex phase-shifting digital holography for micro-optical element surface topography measurment
Fig. 2. Schematic diagram of vortex phase-shifting digital holographic microscopy
Fig. 3. Experimental setup for vortex phase-shifting digital holographic microscopy
Fig. 10. Relationship curves between micro-lens vector height and rotational angle error
Table 1. Actual phase shift and phase shift error in phase shift holograms
View tableView in ArticleTable 1. Actual phase shift and phase shift error in phase shift holograms
No. Theoretical Phase Shift/rad Actual Phase Shift/rad Phase Shift Error/rad 1 0 0 0 2 0.5π 0.4992π −0.0008π 3 π 0.9963π −0.0037π 4 1.5π 1.4876π −0.0024π
Table 2. Experimental results of the measured longitudinal vector height of micro-lens arrays
View tableView in ArticleTable 2. Experimental results of the measured longitudinal vector height of micro-lens arrays
No. Vertical height of single micro-lens/μm Absolute error/μm Relative error/% 1 12.906 0.011 0.085 2 12.917 0.000 0.000 3 12.920 0.003 0.023 4 12.898 0.019 0.147 5 12.921 0.004 0.031 6 12.875 0.042 0.325 7 12.897 0.020 0.155 8 12.860 0.057 0.441 9 12.871 0.046 0.356 10 12.903 0.014 0.108
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Yi-meng XUE, Bing-cai LIU, Yong-qiang PAN, Xin-meng FANG, Ai-ling TIAN, Rui-xuan ZHANG. Vortex phase-shifting digital holography for micro-optical element surface topography measurment[J]. Chinese Optics, 2024, 17(4): 852
Received: Oct. 11, 2023
Accepted: --
Published Online: Aug. 9, 2024
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