[1] Wang W P, Jin L. Research progress of on-chip spectrometer based on the silicon photonics platform[J]. Spectroscopy and Spectral Analysis, 40, 333-342(2020).

[2] Xu F, Pong C S, Zen Z M et al. Electromagnetic driven MEMS micromirror with new torsion beam structure[J]. Laser & Optoelectronics Progress, 61, 1923001(2024).

[3] Zheng Y Q, Chen J M, Zhao X Y et al. MEMS optical acoustic sensor[J]. Laser & Optoelectronics Progress, 60, 0312017(2023).

[4] Yu X Y, Lu Q P, Gao H Z et al. Current status and prospects of portable NIR spectrometer[J]. Spectroscopy and Spectral Analysis, 33, 2983-2988(2013).

[5] Zimmer F, Heberer A, Grüger H et al. Investigation and characterization of highly efficient near-infrared scanning gratings used in near-infrared microspectrometers[J]. Journal of Micro/Nanolithography, 7, 021005(2008).

[6] Yamamoto Y, Shinozaki R, Oka Y et al. A rotational MEMS diffraction grating for realization of micro-sized spectroscope system[C], 208-211(2015).

[7] Lo J F, Chen S J, Yu H Y et al. Multi-cantilever-driven rotational micrograting for MOEMS spectrometer[C], 2421-2424(2007).

[8] Lo J F J, Butte P, Fang Q Y et al. Multilayered MOEMS tunable spectrometer for fluorescence lifetime detection[J]. IEEE Photonics Technology Letters, 22, 486-488(2010).

[9] Luo B, Wen Z Y, Chen L. Design of a MOEMS-based electromagnetic driven high efficacious phase grating with angle sensor[J]. Proceedings of SPIE, 8191, 819122(2011).

[10] Qiao D Y, Kang B P, Liu Y B et al. A resonance scanning grating based on SOI for microspectrometer application[J]. Laser Physics, 23, 035601(2013).

[11] Yu H J. Research on MEMS micromirror technology for laser beam scanning display[D](2022).

[12] Mu C J, Zhang F L, Wu Y M. A novel large-scale electromagnetically actuated MEMS optical scanning mirror[J]. Journal of Semiconductors, 29, 583-587(2008).

[13] Wang H, Li S S, Ai R Q et al. Plasmonically enabled two-dimensional material-based optoelectronic devices[J]. Nanoscale, 12, 8095-8108(2020).

[14] Caucheteur C, Guo T, Albert J. Review of plasmonic fiber optic biochemical sensors: improving the limit of detection[J]. Analytical and Bioanalytical Chemistry, 407, 3883-3897(2015).

[15] Gasior K, Martynkien T, Napiorkowski M et al. A surface plasmon resonance sensor based on a single mode D-shape polymer optical fiber[J]. Journal of Optics, 19, 025001(2017).

[16] Homola J. Surface plasmon resonance sensors for detection of chemical and biological species[J]. Chemical Reviews, 108, 462-493(2008).

[17] Wen L, Liang L, Yang X G et al. Multiband and ultrahigh figure-of-merit nanoplasmonic sensing with direct electrical readout in Au-Si nanojunctions[J]. ACS Nano, 13, 6963-6972(2019).

[18] Nan X H. Study on miniaturized optical sensing and spectral detection devices for biomedical applications[D](2022).

[19] Shan Y M, Ren L J, Shen W J. Study on 2D electrostatic-driven micro scanning mirror applied to LiDAR[J]. Transducer and Microsystem Technologies, 40, 65-68, 72(2021).

[20] Zhang G Z, Wang X, Wang Y et al. Aberration-free dual 2D MEMS mirror scanning method for optical microscopy[J]. Acta Optica Sinica, 43, 2111001(2023).