Fig. 1. Micromirror electromagnetic drive schematic. (a) Force on a rectangular current-carrying coil in a uniform magnetic field; (b) schematic diagram of micromirror structure model

Fig. 2. Micromirror structure design diagram. (a) Front; (b) back

Fig. 3. Au-Si grating narrow-band optical filter structure schematic diagram

Fig. 4. Current loop design drawing. (a) Front of the photocurrent loop leads out the electrode; (b) two sets of current circuit design diagrams

Fig. 5. Simulation of the relationship between current and angle

Fig. 6. Fabrication process of micromirror

Fig. 7. Produced MEMS micromirror photograph

Fig. 8. Packaging diagram of MEMS scanning grating micromirror device

Fig. 9. Schematic diagram of micro mirror angle test. (a) Schematic diagram of laser triangulation; (b) device test photo

Fig. 10. Comparison of angle measurement data and simulation data

Fig. 11. Test results of I-V characteristics of the device. (a) Test results with -0.5‒0.3V; (b) magnification of negative bias test results

Fig. 12. Experimental test device of light detection and sensing performance of micromirror

Fig. 13. Results of photocurrent response function curves at different angles. (a) 10°‒13°; (b) 14°‒17°

Fig. 14. Relation of resonance wavelength and responsiveness with incidence angle