Based on the semiconductor technology, an electromagnetic scanning micromirror of microelectromechanical system (MEMS) for application in the field of microspectrometry is designed and fabricated. By integrating a gold-silicon grating narrowband optical filtering structure onto the mirror surface, spectral separation and detection functions without external detectors are achieved. This is based on the characteristics of its narrowband filtering wavelength varying with the incident light angle, as well as the absorption of incident light through surface plasmon resonance, which generates a photocurrent. Next, an aluminum plating is applied to the back of the micromirror to form ohmic contact and is bonded to a printed circuit board (PCB) to generate a photocurrent. Two sets of current circuits of drive and photocurrent are then designed on the micromirror, where the integration of optical signal detection and electrical signal reading is realized. Compared with a MEMS scanning grating micromirror based on the dispersive splitting principle, the optical path is shortened and system integration is improved. When driven by an 89.2 mA current, the measured device can reach a mechanical angle range of ±11.4°. The I-V characteristic curve shows that the photocurrent loop has obvious Schottky rectification characteristics. The photocurrent response function curve of the incident light angle from 10°?17° is selected for testing. With an increase in the incident angle, the photocurrent response summit gradually moves in the shortwave direction, and the photocurrent response is accompanied by an increase in a photocurrent response. The resonance filtering wavelength has a good linear change relationship with the incident angle, and the resonance wavelength offset of the device is approximately 15.7 nm for every 1° change in the incident light angle.