Optics and Precision Engineering, Volume. 16, Issue 11, 2081(2008)
Design of diffractive optical elements for off-axis illumination in projection lithography
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ZHANG Wei, GONG Yan. Design of diffractive optical elements for off-axis illumination in projection lithography[J]. Optics and Precision Engineering, 2008, 16(11): 2081
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Received: Feb. 26, 2008
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: ZHANG Wei (wzhangys@sina.com)
CSTR:32186.14.
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