Wavefront‐Reconstruction Method of Lateral‐Shear Interference Without Directional Constraints

Kexin Ren; Ailing Tian; Hongjun Wang; Bingcai Liu; Xueliang Zhu; Siqi Wang; Yuwen Zhang; Yuan Su; Jintao Xu

doi:10.3788/CJL231508

Chinese Journal of Lasers, Volume. 51, Issue 13, 1304005(2024)

Wavefront‐Reconstruction Method of Lateral‐Shear Interference Without Directional Constraints

Kexin Ren, Ailing Tian^*, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Yuwen Zhang, Yuan Su, and Jintao Xu

Shaanxi Province Key Laboratory of Thin films Technology and Optical Test, School of Opto-Electronic Engineering, Xi’an Technological University, Xi’an 710021, Shaanxi, China

show less

Abstract Get PDF(in Chinese)

References(28)

[1] Rimmer M P. Method for evaluating lateral shearing interferograms[J]. Applied Optics, 13, 623-629(1974).

[2] Min X Z, Duan Y X, Wang Z Z et al. Quadri-wave lateral shearing interference wavefront reconstruction based on path guidance[J]. Chinese Journal of Lasers, 50, 1804003(2023).

[3] Lu Y J, Li Z L, Tang F et al. Measurement method for numerical aperture of projection lens based on Ronchi lateral shearing interferometry[J]. Chinese Journal of Lasers, 50, 1304006(2023).

[4] Li X, Xu Z K, Yang J Y et al. Advances in phase imaging based on metasurfaces[J]. Laser & Optoelectronics Progress, 61, 0211019(2024).

[5] Li P, Tang F, Wang X Z. Comparison of processing speed of typical wavefront reconstruction methods for lateral shearing interferometry[J]. Applied Optics, 60, 312-325(2021).

[6] Liu X J, Gao Y S, Chang M. A partial differential equation algorithm for wavefront reconstruction in lateral shearing interferometry[J]. Journal of Optics A: Pure and Applied Optics, 11, 045702(2009).

[7] Roddier F, Roddier C. Wavefront reconstruction using iterative Fourier transforms[J]. Applied Optics, 30, 1325-1327(1991).

[8] Dai F Z, Tang F, Wang X Z et al. High spatial resolution zonal wavefront reconstruction with improved initial value determination scheme for lateral shearing interferometry[J]. Applied Optics, 52, 3946-3956(2013).

[9] Tang X, Zhu J F, Zhong P et al. Reliable wavefront reconstruction from a single lateral shearing interferogram using Bayesian convolutional neural network[J]. Optics and Lasers in Engineering, 160, 107281(2023).

[10] Zhong H, Li Y Q, Qin P et al. Hybrid wavefront reconstruction from multi-directional slope and full curvature measurements using integral equations with higher-order truncation errors for wavefront sensors[J]. Optics and Lasers in Engineering, 154, 106991(2022).

[11] Chen X J, Dong L Z, Wang S et al. Algorithms to eliminate the influence of non-uniform intensity distributions on wavefront reconstruction by quadri-wave lateral shearing interferometers[J]. Optics Communications, 402, 276-284(2017).

[12] Nomura T, Okuda S, Kamiya K et al. Improved Saunders method for the analysis of lateral shearing interferograms[J]. Applied Optics, 41, 1954-1961(2002).

[13] Jeong H B, Park H M, Ghim Y S et al. Flexible lateral shearing interferometry based on polarization gratings for surface figure metrology[J]. Optics and Lasers in Engineering, 154, 107020(2022).

[14] Liu K, Zhang X T, Zhong H et al. Key technologies of quadri-wave lateral shearing interferometer[J]. Acta Optica Sinica, 43, 1512001(2023).

[15] Peng A H, Ye H W, Li X Y. 2D lateral shearing wave-front reconstruction based on decoupling difference Zernike future defining coefficient method[J]. Acta Optica Sinica, 31, 0801001(2011).

[16] Liu X J. A polarized lateral shearing interferometer and application for on-machine form error measurement of engineering surfaces[D](2003).

[17] Wang H J, Zhang C, Tian A L et al. Selection of sampling points in two dimensional lateral shearing interferometry[J]. Acta Photonica Sinica, 44, 0312002(2015).

[18] Wang S Q, Liu B C, Wang H J et al. Improving the phase reconstruction accuracy of simultaneous phase-shifted lateral shearing interferometry using a polarization redundant sub-region interpolation method[J]. Optics Express, 30, 34297-34313(2022).

[19] Dai F Z, Zheng Y Z, Bu Y et al. Zernike polynomials as a basis for modal fitting in lateral shearing interferometry: a discrete domain matrix transformation method[J]. Applied Optics, 55, 5884-5891(2016).

[20] Rimmer M P, Wyant J C. Evaluation of large aberrations using a lateral-shear interferometer having variable shear[J]. Applied Optics, 14, 142-150(1975).

[21] Harbers G, Kunst P J, Leibbrandt G W. Analysis of lateral shearing interferograms by use of Zernike polynomials[J]. Applied Optics, 35, 6162-6172(1996).

[22] Dai F Z, Tang F, Wang X Z et al. Use of numerical orthogonal transformation for the Zernike analysis of lateral shearing interferograms[J]. Optics Express, 20, 1530-1544(2012).

[23] Dai F Z, Tang F, Wang X Z et al. Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry: comparisons of existing algorithms[J]. Applied Optics, 51, 5028-5037(2012).

[24] Sun W H, Wang S, He X et al. Modal wavefront reconstruction to obtain Zernike coefficient with no cross coupling in lateral shearing measurement[J]. Opto-Electronic Engineering, 46, 180273(2019).

[25] Dai F Z, Zheng Y Z, Bu Y et al. Modal wavefront reconstruction based on Zernike polynomials for lateral shearing interferometry[J]. Applied Optics, 56, 61-68(2017).

[26] Liu B C, Tian A L, Wang H J et al. Selection and analysis of shearing displacement in lateral shearing interferometry[J]. Journal of Applied Optics, 33, 511-514(2012).

[27] Rhee H G, Ghim Y S, Lee J et al. Correction of rotational inaccuracy in lateral shearing interferometry for freeform measurement[J]. Optics Express, 21, 24799-24808(2013).

[28] Wang H J, Tian A L, Wang J Y. The inspection technology of the displacement of shear on the lateral shearing interferometer based on Radon transform[J]. Optical Technique, 32, 785-786, 789(2006).

Tools

Get Citation

Copy Citation Text

Kexin Ren, Ailing Tian, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Yuwen Zhang, Yuan Su, Jintao Xu. Wavefront‐Reconstruction Method of Lateral‐Shear Interference Without Directional Constraints[J]. Chinese Journal of Lasers, 2024, 51(13): 1304005

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Measurement and metrology

Received: Dec. 11, 2023

Accepted: Feb. 5, 2024

Published Online: Jul. 4, 2024

The Author Email: Ailing Tian (ailintian@xatu.edu.cn)

DOI:10.3788/CJL231508

CSTR:32183.14.CJL231508

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology