Chinese Journal of Lasers, Volume. 51, Issue 13, 1304005(2024)

Wavefront‐Reconstruction Method of Lateral‐Shear Interference Without Directional Constraints

Kexin Ren, Ailing Tian*, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Yuwen Zhang, Yuan Su, and Jintao Xu
Author Affiliations
  • Shaanxi Province Key Laboratory of Thin films Technology and Optical Test, School of Opto-Electronic Engineering, Xi’an Technological University, Xi’an 710021, Shaanxi, China
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    Figures & Tables(15)
    Schematics of lateral shear interference principle. (a) Schematic of lateral shear interference in the x-direction; (b) schematic of lateral shear interference in the y-direction
    Schematic of lateral shear interference
    Flow chart of the lateral shear interference wavefront reconstruction algorithm without directional constraint
    Simulated data. (a) 36-term Zernike polynomial coefficients in wavefront to be measured; (b) wavefront to be measured
    Lateral shear interferogram showing different directions of wavefront to be measured
    Residual error maps for wavefront reconstruction using any two directions interferograms.(a) 0°, 30°; (b) 0°, 45°; (c) 0°, 60°; (d) 0°, 90°; (e) 0°, 135°; (f) 30°, 45°; (g) 30°, 135°; (h) 30°, 180°
    Relationship between shear direction angle and wavefront reconstruction accuracy. (a) PV residual error value of wavefront reconstruction; (b) RMS residual error value of reconstruction wavefront
    Curves of noise level versus wavefront reconstruction error under different angles. (a) PV residual error curves; (b) RMS residual error curves
    Impact of shear rate error on precision of wavefront reconstruction under various angles. (a) PV residual error value curves of wavefront reconstruction; (b) RMS residual error value curves of wavefront reconstruction
    Schematic of multi-directional synchronous phase shift lateral shear interference
    Experimental devices
    CCD acquisition of interferograms with different shear directions. (a) 0°; (b) 5°; (c) 10°; (d) 15°; (e) 25°; (f) 30°; (g) 45°;(h) 60°; (i) 75°; (j) 90°
    Experimental interferogram reconstruction results in any two directions. (a) 0°, 25°; (b) 0°, 30°; (c) 0°, 45°; (d) 0°, 60°; (e) 0°, 75°; (f) 0°, 90°
    • Table 1. PV and RMS residual error values based on the wavefront reconstructed of the lateral shear interferogram in any two directions

      View table

      Table 1. PV and RMS residual error values based on the wavefront reconstructed of the lateral shear interferogram in any two directions

      θ /(°)PV residual error /λRMS residual error /λ
      0,304.231×10-107.763×10-11
      0,453.737×10-107.599×10-11
      0,603.618×10-106.244×10-11
      0,905.032×10-108.538×10-11
      0,1351.474×10-102.628×10-11
      30,454.213×10-106.810×10-11
      30,1352.890×10-105.673×10-11
      30,1803.609×10-106.464×10-11
    • Table 2. Comparison of reconstruction results of lateral shear interferograms in any two directions with reconstruction results of orthogonal directions

      View table

      Table 2. Comparison of reconstruction results of lateral shear interferograms in any two directions with reconstruction results of orthogonal directions

      θ /(°)PV /λRMS /λ

      PV residual

      error /λ

      RMS residual

      error /λ

      0,50.3510.03690.0290.0051
      0,100.3450.03780.0270.0048
      0,150.3420.03840.0210.0046
      0,200.3390.03960.0190.0045
      0,250.3230.03810.0150.0042
      0,300.3250.03820.0160.0048
      0,450.3390.03940.0170.0047
      0,600.3250.03960.0120.0043
      0,750.3270.03950.0180.0041
      0,900.3310.03900.0000.0000
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    Kexin Ren, Ailing Tian, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Yuwen Zhang, Yuan Su, Jintao Xu. Wavefront‐Reconstruction Method of Lateral‐Shear Interference Without Directional Constraints[J]. Chinese Journal of Lasers, 2024, 51(13): 1304005

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    Paper Information

    Category: Measurement and metrology

    Received: Dec. 11, 2023

    Accepted: Feb. 5, 2024

    Published Online: Jul. 4, 2024

    The Author Email: Ailing Tian (ailintian@xatu.edu.cn)

    DOI:10.3788/CJL231508

    CSTR:32183.14.CJL231508

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