Chinese Journal of Lasers, Volume. 51, Issue 13, 1304005(2024)
Wavefront‐Reconstruction Method of Lateral‐Shear Interference Without Directional Constraints
Fig. 1. Schematics of lateral shear interference principle. (a) Schematic of lateral shear interference in the x-direction; (b) schematic of lateral shear interference in the y-direction
Fig. 3. Flow chart of the lateral shear interference wavefront reconstruction algorithm without directional constraint
Fig. 4. Simulated data. (a) 36-term Zernike polynomial coefficients in wavefront to be measured; (b) wavefront to be measured
Fig. 5. Lateral shear interferogram showing different directions of wavefront to be measured
Fig. 6. Residual error maps for wavefront reconstruction using any two directions interferograms.(a) 0°, 30°; (b) 0°, 45°; (c) 0°, 60°; (d) 0°, 90°; (e) 0°, 135°; (f) 30°, 45°; (g) 30°, 135°; (h) 30°, 180°
Fig. 7. Relationship between shear direction angle and wavefront reconstruction accuracy. (a) PV residual error value of wavefront reconstruction; (b) RMS residual error value of reconstruction wavefront
Fig. 8. Curves of noise level versus wavefront reconstruction error under different angles. (a) PV residual error curves; (b) RMS residual error curves
Fig. 9. Impact of shear rate error on precision of wavefront reconstruction under various angles. (a) PV residual error value curves of wavefront reconstruction; (b) RMS residual error value curves of wavefront reconstruction
Fig. 10. Schematic of multi-directional synchronous phase shift lateral shear interference
Fig. 12. CCD acquisition of interferograms with different shear directions. (a) 0°; (b) 5°; (c) 10°; (d) 15°; (e) 25°; (f) 30°; (g) 45°;(h) 60°; (i) 75°; (j) 90°
Fig. 13. Experimental interferogram reconstruction results in any two directions. (a) 0°, 25°; (b) 0°, 30°; (c) 0°, 45°; (d) 0°, 60°; (e) 0°, 75°; (f) 0°, 90°
|
|
Get Citation
Copy Citation Text
Kexin Ren, Ailing Tian, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Yuwen Zhang, Yuan Su, Jintao Xu. Wavefront‐Reconstruction Method of Lateral‐Shear Interference Without Directional Constraints[J]. Chinese Journal of Lasers, 2024, 51(13): 1304005
Category: Measurement and metrology
Received: Dec. 11, 2023
Accepted: Feb. 5, 2024
Published Online: Jul. 4, 2024
The Author Email: Ailing Tian (ailintian@xatu.edu.cn)
CSTR:32183.14.CJL231508