Chinese Journal of Lasers, Volume. 51, Issue 13, 1304005(2024)
Wavefront‐Reconstruction Method of Lateral‐Shear Interference Without Directional Constraints
The lateral-shear-interference technique is utilized widely for measuring wavefront aberration because of its simple structure, common interference, and minimal susceptibility to external environmental interference. However, the shear interferogram reflects only the gradient of the test wavefront’s shear direction, and the wavefront information to be measured cannot be directly obtained from the interferogram. Wavefront-reconstruction methods based on modal and zonal methods typically depend on orthogonal shear interferograms to reconstruct the wavefront being measured. However, discrepancy exists between the shear direction and the orthogonal coordinate axis of the shear interferogram obtained in an actual experiment. If the wavefront to be measured is reconstructed using the method above, then the accuracy of the reconstruction will be affected. To overcome the limitation of lateral-shear interferometric wavefront-reconstruction technology, which is constrained by the shear direction, and to improve the flexibility of experimental operation, a method for lateral-shear interferometric wavefront reconstruction without directional constraints is proposed. This approach is validated via simulation analysis and experiments.
We introduced a shearing-direction parameter and utilized the underlying algorithm for differential Zernike polynomial wavefront reconstruction to facilitate wavefront reconstruction based on any two directions of lateral-shear interferograms. First, the shear-direction angle
The shear interferogram (Fig.5) of the measured wavefront (Fig.4) along any direction is obtained via simulation. Since the distribution of the measured wavefront is unknown during the experiment, the angle of between the two shear directions used for reconstruction is varied from 2° to 90°. Based on the results, the reconstructed wavefront exhibits the largest PV and RMS residual errors when the angle between the two shear directions is 2°, as compared with the results of a reconstructed shear interferogram in the orthogonal direction. When the angle between the two shear directions exceeds 12°, the wavefront-reconstruction accuracy of the method proposed herein aligns with that of the shear interferogram in the orthogonal direction. Additionally, the accuracy of wavefront reconstruction remains unchanged as the angle between the two shear directions increases (Table 1, Fig.7). Meanwhile, the accuracy of wavefront reconstruction decreases as the noise levels increase at various angles (Fig.8). When the relative noise level reaches 100%, the PV and RMS residual error values of the wavefront reconstruction are
This paper introduces an unconstrained wavefront-reconstruction method to overcome the limitations of existing lateral-shear-interferogram reconstruction methods. These methods are constrained by the directionality of the shear interferogram, which restricts their accuracy. The proposed method can achieve wavefront reconstruction using any two lateral interferograms and eliminates the necessity to consider the effect of shear-direction error on the reconstruction accuracy. Moreover, the proposed method is used to process any two directions of lateral-shear interferograms obtained experimentally. When compared with wavefront-reconstruction results based on orthogonal shear interferograms, the accuracy of the reconstructed PV and RMS values are 0.029λ and 0.0051λ higher, respectively, thus validating the accuracy and efficiency of the proposed method.
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Kexin Ren, Ailing Tian, Hongjun Wang, Bingcai Liu, Xueliang Zhu, Siqi Wang, Yuwen Zhang, Yuan Su, Jintao Xu. Wavefront‐Reconstruction Method of Lateral‐Shear Interference Without Directional Constraints[J]. Chinese Journal of Lasers, 2024, 51(13): 1304005
Category: Measurement and metrology
Received: Dec. 11, 2023
Accepted: Feb. 5, 2024
Published Online: Jul. 4, 2024
The Author Email: Ailing Tian (ailintian@xatu.edu.cn)
CSTR:32183.14.CJL231508