Acta Optica Sinica, Volume. 45, Issue 7, 0734001(2025)
Electron Optics of Ring Target High-Speed Scanning Micro-Focus X-Ray Source
[1] Hsieh J[M]. Computed tomography: principles, design, artifacts, and recent advances(2009).
[3] Wan X, Liu X M, Wu Z F. The principle, algorithm and application of computer laminography (CL)[C], 4(2014).
[4] Liu C, Wang F X, Tao F et al. X-ray nano-resolution stereo imaging and its application in chip characterization[J]. Acta Optica Sinica, 44, 1334002(2024).
[5] Cai Y F, Li P Y, Wang J et al. Recent advances in computed laminography for nondestructive testing of plate-shell objects[J]. Chinese Journal of Scientific Instrument, 41, 11-25(2020).
[7] Wei C F, Ruan Y F, Zhou J G et al. An electron beam microfocus source imaging system based on dynamic scanning of transmission targets[P].
[8] Fu J, Wang H J, Li B et al. Computed laminography imaging inspection method for plate-shell microelectronic devices[J]. Acta Electronica Sinica, 38, 1580-1584(2010).
[10] Gu W Q[M]. Electron beam exposure micro-nano processing technology, 66-71(2004).
[12] Sun B T. Research on focusing and astigmatism control technology of electron beam selective melting[D], 9-18(2021).
[15] Shi L N, Liu J B, Niu G et al. Electro-optical design of focusing system for rod-anode X-ray sources[J]. Acta Optica Sinica, 42, 2234001(2022).
Get Citation
Copy Citation Text
Lina Shi, Geng Niu, Junbiao Liu, Li Han. Electron Optics of Ring Target High-Speed Scanning Micro-Focus X-Ray Source[J]. Acta Optica Sinica, 2025, 45(7): 0734001
Category: X-Ray Optics
Received: Dec. 5, 2024
Accepted: Jan. 22, 2025
Published Online: Apr. 27, 2025
The Author Email: Geng Niu (niug825@mail.iee.ac.cn), Junbiao Liu (liujb@mail.iee.ac.cn)
CSTR:32393.14.AOS241841