Electron Optics of Ring Target High-Speed Scanning Micro-Focus X-Ray Source

Fig. 1. Diagrams of CL techniques. (a) CT technique based on traditional micro-focus X-ray source; (b) CL technique based on toroidal target high-speed scanning micro-focus X-ray source

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Fig. 2. Micro-focus X-ray source system for high speed scanning of ring targets

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Fig. 3. Diagrams of ideal deflection trajectory of electron beam and approximate trajectory of third-order deflection (actual trajectory)

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Fig. 4. Structure diagram of magnetic lens

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Fig. 5. Simulation structural model of deflector

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Fig. 6. Physical model of ring target high-speed scanning micro-focus X-ray source

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Fig. 7. Beam spot sizes at scanning field edges for different working distances (without any aberration correction). (a) Working distance is 25 mm; (b) working distance is 50 mm; (c) working distance is 80 mm; (d) working distance is 100 mm

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Fig. 8. Beam spot sizes at scanning field edges for different scanning ranges (without any aberration correction). (a) Scanning range is 5 mm; (b) scanning range is 10 mm; (c) scanning range is 20 mm; (d) scanning range is 50 mm; (e) scanning range is 100 mm; (f) scanning range is 200 mm

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Fig. 9. Shapes of beam spots at scanning field edges (scanning range is 20 mm, and working distance is 100 mm). (a) Without correction; (b) correction of deflection astigmatism; (c) correction of deflection field curvature; (d) correction of deflection distortion; (e) correction of all deflection aberrations

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Table 1. Performance parameters of LaB₆ electron gun

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Table 1. Performance parameters of LaB₆ electron gun

Accelerating

voltage /kV

Grid

voltage /V

Cross

spot /μm

Position of cross

spot /mm

Total beam

current /mA

Maximum brightness /

［10⁵ A/（cm²·sr^-1）］

Half angle of

maximum beam /mrad

160

-75

19.04

0.98

1.65

22.28

1.06

Table 2. Minimum beam spot sizes of deflection field centers corresponding to different working distances

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Table 2. Minimum beam spot sizes of deflection field centers corresponding to different working distances

Magnetic lens position /mm	Image plane position /mm	Working distance /mm	Deflector position /mm	Magnetic lens excitation /At	Deflection sensitivity / （mm/A）	Minimum spot diameter /μm
269.45	294.45	25	285.85	1826.56	0.22	1.84
269.45	319.45	50	285.85	1331.82	0.80	3.60
269.45	349.45	80	285.85	1096.99	1.52	5.73
269.45	369.45	100	285.85	1007.59	2.01	7.15

Table 3. Beam spot sizes before and after deflection aberration correction

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Table 3. Beam spot sizes before and after deflection aberration correction

Deflection field spot diameter /μm		d_min for Φ= 5 mm	d_max for Φ= 5 mm	d_min for Φ= 10 mm	d_max for Φ= 10 mm	d_min for Φ= 20 mm	d_max for Φ= 20 mm	d_min for Φ= 50 mm	d_max for Φ= 50 mm	d_min for Φ= 100 mm	d_max for Φ= 100 mm	d_min for Φ= 200 mm	d_max for Φ= 200 mm
Working distance is 100 mm	Without correction	7.2	7.5	7.7	10.2	13.6	28.8	75.5	174.2	302.3	695.1	1210.4	2770.6
	Correct deflection astigmatism	7.1	7.2	7.6	7.7	11.0	11.2	49.3	49.8	194.2	195.7	773.3	780.1
	Correct deflection field curvature	7.2	7.4	8.4	8.9	20.6	21.4	123.0	125.4	493.5	499.8	1980.2	1990.6
	Correct deflection distortion	7.2	7.5	7.7	10.2	13.6	28.8	75.5	174.2	302.3	695.1	1210.4	2770.3
	Correct all	7.1	7.2	7.2	7.4	7.9	8.1	11.5	12.4	19.7	22.2	37.8	43.2
Working distance is 50 mm	uncorrected	3.7	5.3	5.4	15.7	18.0	60.5	112.6	376.1	451.8	1503.4	1806.7	6010.6
	Correct deflection astigmatism	3.9	4.0	6.6	6.7	21.6	21.9	132.0	133.2	525.9	531.5	2101.7	2129.4
	Correct deflection field curvature	4.1	4.5	9.9	10.6	38.9	39.8	243.3	246.7	973.7	987.0	3895.5	3944.0
	Correct deflection distortion	3.7	5.3	5.4	15.7	18.0	60.5	112.6	376.1	451.8	1503.4	1806.7	6010.6
	Correct all	3.6	3.7	3.8	3.9	4.3	4.7	6.9	8.7	12.5	16.4	24.3	32.5

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Lina Shi, Geng Niu, Junbiao Liu, Li Han. Electron Optics of Ring Target High-Speed Scanning Micro-Focus X-Ray Source[J]. Acta Optica Sinica, 2025, 45(7): 0734001

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