Optics and Precision Engineering, Volume. 33, Issue 12, 1916(2025)

Design and fabrication of a quad-mass high-frequency triaxial MEMS gyroscope

Wenqiang WEI1, Huimin TIAN1, Qi CAI1, Rang CUI1, Haoran LI1, and Huiliang CAO2、*
Author Affiliations
  • 1School of Instrument and Electronics, North University of China, Taiyuan03005, China
  • 2School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing, 100081, China
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    Wenqiang WEI, Huimin TIAN, Qi CAI, Rang CUI, Haoran LI, Huiliang CAO. Design and fabrication of a quad-mass high-frequency triaxial MEMS gyroscope[J]. Optics and Precision Engineering, 2025, 33(12): 1916

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    Paper Information

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    Received: Mar. 4, 2025

    Accepted: --

    Published Online: Aug. 15, 2025

    The Author Email:

    DOI:10.37188/OPE.20253312.1916

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