Optics and Precision Engineering, Volume. 33, Issue 12, 1916(2025)
Design and fabrication of a quad-mass high-frequency triaxial MEMS gyroscope
Figures & Tables(18)
Fig. 1. Schematic diagram of the structure of quad-mass high- frequency triaxial MEMS gyroscope
Fig. 2. Schematic diagrams of the working modes of quad-mass high-frequency triaxial MEMS gyroscope
Fig. 3. Physical model of quad-mass high-frequency triaxial MEMS gyroscope
Fig. 7. Parameter optimization design process of triaxial MEMS gyroscope
Fig. 10.
Fig. 12. Amplitude-frequency characteristic curves of the triaxial MEMS gyroscope
Fig. 13. Influence of etching tilt angle on the resonant frequency of working mode and the frequency difference between sense mode and drive mode
Fig. 14. Influence of stress on the resonant frequency of working mode and the frequency difference between sense mode and drive mode
Table 1. Parameters of the triaxial MEMS gyroscope after optimization
View tableView in ArticleTable 1. Parameters of the triaxial MEMS gyroscope after optimization
参数 数值/μm 参数 数值/μm w1 14 w2 11 w3 24.53 w4 19.77 w5 19.85 w6 14.01 w7 25.47 w8 12.79 w9 15.15
Table 2. Simulated resonance frequencies of the working modes and frequency differences from the drive mode
View tableView in ArticleTable 2. Simulated resonance frequencies of the working modes and frequency differences from the drive mode
模态 仿真谐振频率/Hz 与驱动模态频差/Hz 驱动模态 30 263 - X轴检测模态 30 173 90 Y轴检测模态 30 125 137 Z轴检测模态 30 116 147
Table 3. Test results of the resonance frequencies of the working modes and the quality factors
View tableView in ArticleTable 3. Test results of the resonance frequencies of the working modes and the quality factors
模式 谐振频率/Hz Q值 驱动模式 29 692 1 274 X轴检测 31 290 354 Y轴检测 29 881 305 Z轴检测 30 721 393
Table 4. Comparison with domestic and foreign single-drive triaxial gyroscopes
View tableView in ArticleTable 4. Comparison with domestic and foreign single-drive triaxial gyroscopes
单位 结构尺寸/mm2 轴向 谐振频率/kHz Q值 单位 结构尺寸/mm2 轴向 谐振频率/kHz Q值 韩国科技教育大学［ 13 ］1.426×1.426 驱动 13.892 12 000 印度博拉理工学院［ 18 ］2.7×2.7 驱动 7.826 2 - X轴 16.404 500 X轴 7.311 7 - Y轴 16.214 500 Y轴 8.725 8 - Z轴 15.398 2 000 Z轴 8.564 - 韩国蔚山大学［ 14 ］2×2 驱动 16.9 720 东南大学［ 21 ］10×10 驱动 6.950 2 455 X/Y轴 16.47 4 370 X轴 7.034 2 109 Z轴 17.04 3 922 Y轴 7.040 5 107 美国加州大学戴维斯分校［ 15 ］3.2×3.2 驱动 27.964 9 840 Z轴 7.054 4 66 X轴 25.901 927 北京航天控制仪器研究所［ 22 ］6.5×6.5 驱动 8.798 3412 Y轴 27.115 5 989 X轴 8.470 845.5 Z轴 30.559 6 744 Y轴 8.450 564.3 韩国浦项科技大学［ 16 ］1.7×1.7 驱动 22.727 106 Z轴 8.258 274 6 X/Y轴 22.831 - 本文 3×2.56 驱动 29.692 127 4 Z轴 17.241 - X轴 31.290 354 日本东芝公司［ 17 ］2.85×2.05 驱动 20.6 - Y轴 29.881 305 X轴 24.2 - Z轴 30.721 393 Y轴 24.8 - Z轴 24.2 -
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Wenqiang WEI, Huimin TIAN, Qi CAI, Rang CUI, Haoran LI, Huiliang CAO. Design and fabrication of a quad-mass high-frequency triaxial MEMS gyroscope[J]. Optics and Precision Engineering, 2025, 33(12): 1916
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Received: Mar. 4, 2025
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Published Online: Aug. 15, 2025
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