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Chinese Journal of Lasers, Volume. 36, Issue 12, 3138(2009)

Micro Etching of GaN-Based Semiconductor Materials Using 157 nm Laser

Dai Yutang*, Xu Gang, Cui Jianlei, and Bai Fan
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    Dai Yutang, Xu Gang, Cui Jianlei, Bai Fan. Micro Etching of GaN-Based Semiconductor Materials Using 157 nm Laser[J]. Chinese Journal of Lasers, 2009, 36(12): 3138

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    Paper Information

    Category: micro and nano optics

    Received: Sep. 30, 2009

    Accepted: --

    Published Online: Dec. 18, 2009

    The Author Email: Yutang Dai (daiyt68@163.com)

    DOI:10.3788/cjl20093612.3138

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology