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Chinese Journal of Lasers, Volume. 46, Issue 5, 0504003(2019)

Estimation of System Point Spread Function to Reduce Errors in Phase Measuring Profilometry

Yi Tian1, Guoqi Bao2, and Kai Liu1、*
Author Affiliations
  • 1College of Electrical Engineering and Information Technology, Sichuan University, Chengdu, Sichuan 610065, China
  • 2Guangdong Provincial Public Security, Guangzhou, Guangdong 510050, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (9)
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    References (18)
    Cited By (2)
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    Figures & Tables(9)
    Relationship between amplitude and frequency at 320th column. (a) Average intensity Ac; (b) intensity modulation Bc

    Fig. 1. Relationship between amplitude and frequency at 320th column. (a) Average intensity Ac; (b) intensity modulation Bc

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    Fitting curves of intensity modulation ratioversus frequency

    Fig. 2. Fitting curves of intensity modulation ratioversus frequency

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    Reconstruction results obtained with different methods. (a) Conventional PMP method; (b) proposed method

    Fig. 3. Reconstruction results obtained with different methods. (a) Conventional PMP method; (b) proposed method

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    Scanning target. (a) Reference plane; (b) plane with black letters

    Fig. 4. Scanning target. (a) Reference plane; (b) plane with black letters

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    Fitting curves of intensity modulation ratio versus frequency

    Fig. 5. Fitting curves of intensity modulation ratio versus frequency

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    Reconstruction results obtained with different methods. (a) Conventional PMP method; (b) method in Ref. [14]; (c) method in Ref. [15]; (d) proposed method

    Fig. 6. Reconstruction results obtained with different methods. (a) Conventional PMP method; (b) method in Ref. [14]; (c) method in Ref. [15]; (d) proposed method

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    Comparison of phase errors at 320th column

    Fig. 7. Comparison of phase errors at 320th column

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    Reconstruction results of stripe pillow. (a) Conventional PMP method; (b) proposed method

    Fig. 8. Reconstruction results of stripe pillow. (a) Conventional PMP method; (b) proposed method

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    • Table 1. Root-mean-square error of phase of different methods10-4 rad

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      Table 1. Root-mean-square error of phase of different methods10-4 rad

      PMPmethodMethod inRef. [14]Method inRef. [15]Proposedmethod
      6.62355.01644.95254.5999
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    Yi Tian, Guoqi Bao, Kai Liu. Estimation of System Point Spread Function to Reduce Errors in Phase Measuring Profilometry[J]. Chinese Journal of Lasers, 2019, 46(5): 0504003

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    Paper Information

    Category: measurement and metrology

    Received: Dec. 7, 2018

    Accepted: Feb. 18, 2019

    Published Online: Nov. 11, 2019

    The Author Email: Liu Kai (kailiu@scu.edu.cn)

    DOI:10.3788/CJL201946.0504003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology