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Chinese Journal of Lasers, Volume. 46, Issue 5, 0504003(2019)

Estimation of System Point Spread Function to Reduce Errors in Phase Measuring Profilometry

Yi Tian1, Guoqi Bao2, and Kai Liu1、*
Author Affiliations
  • 1College of Electrical Engineering and Information Technology, Sichuan University, Chengdu, Sichuan 610065, China
  • 2Guangdong Provincial Public Security, Guangzhou, Guangdong 510050, China
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    Article index updated: Mar. 10, 2025

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    Yi Tian, Guoqi Bao, Kai Liu. Estimation of System Point Spread Function to Reduce Errors in Phase Measuring Profilometry[J]. Chinese Journal of Lasers, 2019, 46(5): 0504003

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    Paper Information

    Category: measurement and metrology

    Received: Dec. 7, 2018

    Accepted: Feb. 18, 2019

    Published Online: Nov. 11, 2019

    The Author Email: Liu Kai (kailiu@scu.edu.cn)

    DOI:10.3788/CJL201946.0504003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology