Study on Parameters Inversion and Groove Depth Accuracy Control in Laser Machining of Hydrodynamic Grooves of Mechanical Seal

Shuo Chen; Xiaolei Liu; Qiangguo Deng; Xuejian Sun; Hengjie Xu; Wenyuan Mao

doi:10.3788/CJL231311

Chinese Journal of Lasers, Volume. 51, Issue 16, 1602407(2024)

Study on Parameters Inversion and Groove Depth Accuracy Control in Laser Machining of Hydrodynamic Grooves of Mechanical Seal

Shuo Chen, Xiaolei Liu, Qiangguo Deng, Xuejian Sun, Hengjie Xu, and Wenyuan Mao^*

Author Affiliations

Faculty of Chemical Engineering, Kunming University of Science and Technology, Kunming 650500, Yunnan , China

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Figures & Tables(11)

Fig. 1. Principle diagram of machining precision control of hydrodynamic groove depth under multiple inversion

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Fig. 2. Schematic diagram of hydrodynamic groove laser machining and measuring system

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Fig. 3. Calculation flow chart

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Fig. 4. Relative error of hydrodynamic groove depth under different numbers of inversion

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Fig. 5. Two-dimensional topography of groove depth under single and double inversion (h_g=5.00 μm). (a) i=1; (b) i=2 (No.1); (c) i=2 (No.2); (d) i=2 (No.3)

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Fig. 6. Two-dimensional topography of groove depth under single and double inversion(h_g=20.00 μm). (a) i=1; (b) i=2 (No.1); (c) i=2 (No.2); (d) i=2 (No.3)

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Table 1. Experimental parameters of laser machining

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Table 1. Experimental parameters of laser machining

Parameter	Symbol	Value
Laser power /W	P	1.02， 1.84， 2.80， 3.87， 4.99， 6.15， 7.28， 8.50， 9.61， 10.72， 11.87， 12.94， 13.88， 15.03， 16.13， and 17.11
Repetition frequency /kHz	f	30， 35， 40， 45， 50， 55， and 60
Scanning speed /mm⋅s^-1	v_scan	86.60， 166.21， 239.34， 284.64， 361.52， 432.19， 495.16， 555.18， 609.44， 658.52， 707.14， 751.36， 787.52， 830.43， 870.10， and 913.39
Filling spacing /µm	S	6‒21
Number of marking	n	1， 2， 3， 4， 5， 6， 7， 8， 9， and 10
Target groove depth/µm	h_g	5， 6， 7， 8， 9， 10， 20， and 30

Table 2. Single inversion results of process parameters under different target groove depths

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Table 2. Single inversion results of process parameters under different target groove depths

No.	Inversion process parameter					h_g/μm	h_ge/μm	ε /%
No.	P /W	f /kHz	v_scan/mm·s^-1	S /μm	n /time	h_g/μm	h_ge/μm	ε /%
1	9.61	60	609.44	17.3606	3	5	4.15	17.00
2	15.03	30	555.18	17.3494	1	5	4.65	7.00
3	11.87	50	707.14	20.8921	3	6	5.85	2.50
4	9.61	30	555.18	16.4411	2	6	5.89	1.83
5	15.03	50	361.52	16.5381	1	7	7.26	3.71
6	13.88	60	495.16	19.6374	2	7	6.69	4.43
7	9.61	35	361.52	17.8399	2	8	7.89	1.38
8	15.03	30	432.19	14.0136	1	8	7.79	2.63
9	16.13	55	707.14	20.8669	3	9	8.21	8.78
10	9.61	30	609.44	19.8694	4	9	8.15	9.44
11	10.72	35	432.19	13.9245	2	10	11.63	16.30
12	11.87	50	609.44	19.4187	4	10	10.06	0.60
13	17.11	40	495.16	16.0909	3	20	21.11	5.55
14	11.87	45	658.52	14.2536	6	20	19.39	3.05
15	9.61	45	555.18	10.8605	8	30	27.54	8.20
16	11.87	35	555.18	6.2479	3	30	29.81	0.63

Table 3. Relative error of groove depth after inversion correction

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Table 3. Relative error of groove depth after inversion correction

No.	n_i /time	ε_i=20%		ε_i=30%		ε_i=40%		ε_i=50%
No.	n_i /time	k_i /time	ε $_{i}^{'}$ /%	k_i /time	ε $_{i}^{'}$ /%	k_i /time	ε $_{i}^{'}$ /%	k_i /time	ε $_{i}^{'}$ /%
1	2	1	40.00	1	35.00	1	30.00	1	25.00
2	3	1	20.00	1	13.33	1	6.67	1	0
3	4	1	10.00	1	2.50	2	30.00	2	25.00
4	5	1	4.00	2	22.00	2	16.00	2	10.00
5	6	1	0	2	13.33	2	6.67	2	0
6	7	2	14.29	2	7.14	2	0	3	14.29
7	8	2	10.00	2	2.50	3	12.50	3	6.25
8	9	2	6.67	3	13.33	3	6.67	3	0
9	10	2	4.00	3	9.00	3	2.00	4	10.00

Table 4. Experimental results after 2 inversions ( $h_{1, g e}^{} < h_{g}^{}$ )

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Table 4. Experimental results after 2 inversions ( $h_{1, g e}^{} < h_{g}^{}$ )

No.	Inversion of process parameter					Experimental groove depth /μm		Relative error /%
No.	P /W	f /kHz	v_scan /mm·s^-1	S /μm	n₂ /time	$h_{2, g e}^{}$	（ $h_{2, g e}^{}$ ）^*	ε₁	ε₂	ε
1	3.87	35	707.14	6.0433	1	0.75	4.90	17.00	11.76	2.00
2	7.28	60	658.52	15.4988	1	0.98	5.13	17.00	15.29	2.60
3	6.15	55	432.19	16.1786	1	0.94	5.09	17.00	10.59	1.80

Table 5. Experimental results after two inversions( $h_{1, g e}^{}$ >h_g)

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Table 5. Experimental results after two inversions( $h_{1, g e}^{}$ >h_g)

No.	Inversion of process parameter					Experimental groove depth /μm		Relative error /%
No.	P /W	f /kHz	v_scan /mm·s^-1	S /μm	n₂ /time	$h_{2, g e}^{}$	（ $h_{2, g e}^{}$ ）^*	ε₁	ε $_{1}^{'}$	ε₂	ε
1	9.61	50	239.34	14.7195	1	6.04	20.10	5.55	29.63	1.68	0.50
2	12.94	60	361.52	14.2659	1	6.23	20.29	5.55	29.63	4.88	1.45
3	11.87	60	495.16	9.0299	1	6.39	20.45	5.55	29.63	7.58	2.25

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Shuo Chen, Xiaolei Liu, Qiangguo Deng, Xuejian Sun, Hengjie Xu, Wenyuan Mao. Study on Parameters Inversion and Groove Depth Accuracy Control in Laser Machining of Hydrodynamic Grooves of Mechanical Seal[J]. Chinese Journal of Lasers, 2024, 51(16): 1602407

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