Infrared and Laser Engineering, Volume. 50, Issue 11, 20210022(2021)

Simulink simulation guiding the experimental exploration of long pulse width of discharge excimer laser

Dongsheng Liu1,2, Xu Liang2, Ying Lin2, Yifan Xu2, and Xiaodong Fang2,3
Author Affiliations
  • 1Institude of Physical Science and Information Technology, Anhui University, Hefei 230601, China
  • 2Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
  • 3Shenzhen ShengFang Tech Co., Ltd., Shenzhen 518100, China
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    Dongsheng Liu, Xu Liang, Ying Lin, Yifan Xu, Xiaodong Fang. Simulink simulation guiding the experimental exploration of long pulse width of discharge excimer laser[J]. Infrared and Laser Engineering, 2021, 50(11): 20210022

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    Paper Information

    Category: Lasers & Laser optics

    Received: Dec. 29, 2020

    Accepted: --

    Published Online: Dec. 7, 2021

    The Author Email:

    DOI:10.3788/IRLA20210022

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