Infrared and Laser Engineering, Volume. 50, Issue 11, 20210022(2021)
Simulink simulation guiding the experimental exploration of long pulse width of discharge excimer laser
Figures & Tables(13)
Fig. 3. Waveform of cavity equivalent resistance voltage and discharge capacitor voltage
Fig. 4. Simulation model of discharge excitation circuit with 3-level PFN structure
Fig. 6. Simulation model of discharge excitation circuit with 4-level PFN structure
Fig. 7. Simulated waveform of impedance mismatch of 4-level PFN structure
Table 1. Pulse width with different peaking capacitance values
View tableView in ArticleTable 1. Pulse width with different peaking capacitance values
Item Capacitance/nF 14 15.4 16.8 Inductance/nH 0.8 0.9 1 Pulse width/ns 48 52 54
Table 2. Pulse width for different peaking inductance values
View tableView in ArticleTable 2. Pulse width for different peaking inductance values
Item Inductance/nH 1 1.5 2 2.5 3 4 Pulse width/ns 54 59 64 70 73 80
Table 3. Experimental data of different laser pulse widths
View tableView in ArticleTable 3. Experimental data of different laser pulse widths
Voltage/kV Energy/mJ Energy transfer efficiency Typical structure （Pulse width 30 ns） Pulse width elongated structure （Pulse width 60 ns） Typical structure （Pulse width 30 ns） Pulse width elongated structure （Pulse width 60 ns） 25 296 270 1.579% 1.44% 26 323 307 1.593% 1.514% 27 342 362 1.564% 1.655% 28 360 407 1.531% 1.73% 29 388 428 1.538% 1.696%
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Dongsheng Liu, Xu Liang, Ying Lin, Yifan Xu, Xiaodong Fang. Simulink simulation guiding the experimental exploration of long pulse width of discharge excimer laser[J]. Infrared and Laser Engineering, 2021, 50(11): 20210022
Paper Information
Category: Lasers & Laser optics
Received: Dec. 29, 2020
Accepted: --
Published Online: Dec. 7, 2021
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