Researching | MEMS Dynamic Testing Technique Based on Differential Laser Doppler Effect

Acta Optica Sinica, Volume. 27, Issue 1, 63(2007)

MEMS Dynamic Testing Technique Based on Differential Laser Doppler Effect

[in Chinese]^*, [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. MEMS Dynamic Testing Technique Based on Differential Laser Doppler Effect[J]. Acta Optica Sinica, 2007, 27(1): 63

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Jan. 4, 2006

Accepted: --

Published Online: Jan. 22, 2007

The Author Email: (zt117@eyou.com)

DOI:

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology