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Acta Optica Sinica, Volume. 27, Issue 1, 63(2007)

MEMS Dynamic Testing Technique Based on Differential Laser Doppler Effect

[in Chinese]*, [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. MEMS Dynamic Testing Technique Based on Differential Laser Doppler Effect[J]. Acta Optica Sinica, 2007, 27(1): 63

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 4, 2006

    Accepted: --

    Published Online: Jan. 22, 2007

    The Author Email: (zt117@eyou.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology