[1] [1] L. J. Hornbeck. Deformable-mirror spatial light modulators［C］. SPIE, 1990, 1150: 86～102

[2] [2] L. J. Hornbeck. Digtial light processing for high-brightness, high-resolution application［C］. SPIE, 1997, 3013: 27～40

[3] [3] S. Ri, M. Fujigaki, T. Matui et al.. Accurate pixel-to-pixel correspondence adjustment in a digital micromirror device camera by using the phase-shifting moiré method［J］. Appl. Opt., 2007, 45(27): 6940～6946

[4] [4] Guo Xiaowei, Du Jinglei, Chen Minyong et al.. Improving the edge profiles of lithography graphics using gray-tone technique in digital photolithography［J］. Opto-Electronic Engineering, 2006, 33(11): 31～35

[5] [5] Zou Jingxian, Wu Rongzhi. Digital micromirror device［J］. Chinese J. Liquid Crystals and Displays, 2003, 18(6): 445～449

[6] [6] Guo Xiaowei, Du Jinglei, Luo Boliang et al.. Imaging model for DMD-based gray-tone lithography system［J］. Acta Photonica Sinica, 2006, 35(9): 1412～1416

[7] [7] Han Chao, Wei Sui, Quan Xilong et al.. Holographic display of digital micro-mirror or device［J］. Chinese J. Lasers, 2010, 37(1): 190～194

[8] [8] Wang Dapeng, Wei Sui. Phase modulation properties of digital micromirror device［J］. Acta Optica Sinica, 2007, 27(7): 1255～1260