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Chinese Journal of Lasers, Volume. 39, Issue 6, 616002(2012)

A Graphic Matching Method for Digital Micromirror Device Maskless Photolithography

Zhu Jiangping1,2,3、*, Hu Song1, Yu Junsheng2, Chen Mingyong1, He Yu1,3, and Liu Qi1,3
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  • 1[in Chinese]
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    Article index updated: Mar. 10, 2025

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    Zhu Jiangping, Hu Song, Yu Junsheng, Chen Mingyong, He Yu, Liu Qi. A Graphic Matching Method for Digital Micromirror Device Maskless Photolithography[J]. Chinese Journal of Lasers, 2012, 39(6): 616002

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Feb. 20, 2012

    Accepted: --

    Published Online: May. 16, 2012

    The Author Email: Jiangping Zhu (zsyioe@163.com)

    DOI:10.3788/cjl201239.0616002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology