Transmission Spectrum of Multilayer AlGaN Thin Film on Sapphire Substrate

Haojie Li; Yan Zhang

doi:10.3788/AOS202040.1931002

Acta Optica Sinica, Volume. 40, Issue 19, 1931002(2020)

Transmission Spectrum of Multilayer AlGaN Thin Film on Sapphire Substrate

Haojie Li^1,2 and Yan Zhang^1、*

¹Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(22)

Fig. 1. Optical measurement results of #840, #844, #848 samples and sapphire. (a) Measurement results of sapphire under incident angle of 60°; (b) transmission spectra of #840、#844、#848 samples and sapphire

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$Optical parameter fitting results of sapphire. (a) Complex refractive index and extinction coefficient of sapphire; (b) transmission spectra under different conditions$

Fig. 2. Optical parameter fitting results of sapphire. (a) Complex refractive index and extinction coefficient of sapphire; (b) transmission spectra under different conditions

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$Refractive index of full composition AlGaN. (a) Result comparison of proposed refractive index model (line) and that in Ref. [19] (dot); (b) simple verification in full composition range$

Fig. 3. Refractive index of full composition AlGaN. (a) Result comparison of proposed refractive index model (line) and that in Ref. [19] (dot); (b) simple verification in full composition range

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Fig. 4. Absorption coefficient of AlGaN versus photon energy

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Fig. 5. Absorption coefficient of full composition AlGaN versus photon energy. (a) Result comparison of corrected absorption coefficient model (line) and that in Ref. [19] (dot); (b) simple verification in full composition range

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Fig. 6. Transmission spectra of different AlGaN. (a) Different thicknesses; (b) different compositions

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Fig. 7. Transmission spectra of structures A, B and C

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Fig. 8. Transmission spectra of #840

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Fig. 9. Transmission spectra of #844

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Fig. 10. Transmission spectra of #848

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Table 1. Designed structure of # 840
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Table 1. Designed structure of # 840
Layer No. Material Doping type Thickness /μm Al component
1 GaN p 0.20 0
2 GaN i 0.20 0
3 Al_xGa_1-_xN i 0.05 [0,0.55]
4 Al_0.55Ga_0.45N n 1.00 0.55
5 Al_0.55Ga_0.45N i 1.00 0.55

Table 1. 1 Parameters of fitting structure 844-1
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Table 1. 1 Parameters of fitting structure 844-1
Layer No. Material Thickness /μm Atomic fractionof Al
1 GaN 0.15 0.021
2 AlGaN 0.04 0.230
3 AlGaN 0.37 0.420
4 AlGaN 0.05 0.490
5 AlGaN 2.48 0.550
6 AlGaN 0.05 0.650
7 AlGaN 0.05 0.780
8 AlN 1.14 1.000

Table 1. 0 Parameters of fitting structures 840-3 and 840-4
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Table 1. 0 Parameters of fitting structures 840-3 and 840-4
Layer No. Material Thickness /μm Atomic fractionof Al
1 GaN 0.36 0.035
2 AlGaN 0.02 0.330
3 AlGaN 0.04 0.400
4 AlGaN 2.00 0.550
5 AlGaN 0.04 0.650
6 AlGaN 0.02 0.790
7 AlN 1.68 1.000

Table 1. 2 Parameters of fitting structure 848-1
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Table 1. 2 Parameters of fitting structure 848-1
Layer No. Material Thickness /μm Atomic fractionof Al
1 GaN 0.27 0.02
2 AlGaN 0.05 0.17
3 AlGaN 0.05 0.28
4 ZlGaN 0.39 0.47
5 AlGaN 0.02 0.53
6 AlGaN 2.37 0.60
7 AlGaN 0.05 0.66
8 AlGaN 0.05 0.78
9 AlN 0.50 1.00

Table 2. Designed structure of # 844

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Table 2. Designed structure of # 844

Layer No.	Material	Doping type	Thickness /μm	Al component
1	GaN	p	0.20	0
2	Al_0.2Ga_0.8N	p	0.04	0.20
3	Al_0.42Ga_0.58N	i	0.14	0.42
4	Al_0.42Ga_0.58N	n	0.06	0.42
5	Al_0.42Ga_0.58N	i	0.18	0.42
6	Al_xGa_1-_xN	n	0.05	[0.42,0.55]
7	Al_0.55Ga_0.45N	n	2.00	0.55
8	Al_0.55Ga_0.45N	i	0.50	0.55

Table 3. Designed structure of # 848

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Table 3. Designed structure of # 848

Layer No.	Material	Doping type	Thickness /μm	Al component
1	GaN	p	0.30	0
2	Al_xGa_1-_xN	p	0.05	[0,0.42]
3	Al_0.42Ga_0.58N	i	0.14	0.42
4	Al_0.42Ga_0.58N	n	0.06	0.42
5	Al_0.42Ga_0.58N	i	0.18	0.42
6	Al_xGa_1-_xN	n	0.05	[0.42,0.55]
7	Al_0.55Ga_0.45N	n	2.50	0.55
8	Al_0.55Ga_0.45N	i	1.00	0.55

Table 4. FWHMs of #840、#844 and#848
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Table 4. FWHMs of #840、#844 and#848
Sample No. FWHM /(″)
(002) (102)
#840 397 902
#844 434 597
#848 462 649

Table 5. Parameters of structure A
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Table 5. Parameters of structure A
Layer No. Material Thickness /μm Atomic fractionof Al
1 AlGaN 0.6 0.6

Table 6. Parameters of structure B
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Table 6. Parameters of structure B
Layer No. Material Thickness /μm Atomic fractionof Al
1 AlGaN 0.03 0.3
2 AlGaN 0.57 0.6

Table 7. Parameters of structure C
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Table 7. Parameters of structure C
Layer No. Material Thickness /μm Atomic fractionof Al
1 AlGaN 0.01 0.1
2 AlGaN 0.01 0.3
3 AlGaN 0.01 0.5
4 AlGaN 0.57 0.6

Table 8. Parameters of fitting structure 840-1
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Table 8. Parameters of fitting structure 840-1
Layer No. Material Thickness /μm Atomic fractionof Al
1 GaN 0.36 0.035

Table 9. Parameters of fitting structure 840-2
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Table 9. Parameters of fitting structure 840-2
Layer No. Material Thickness /μm Atomic fractionof Al
1 GaN 0.36 0.035
2 AlGaN 2.12 0.550
3 AlN 1.68 1.000