Transmission Spectrum of Multilayer AlGaN Thin Film on Sapphire Substrate

Haojie Li; Yan Zhang

doi:10.3788/AOS202040.1931002

Acta Optica Sinica, Volume. 40, Issue 19, 1931002(2020)

Transmission Spectrum of Multilayer AlGaN Thin Film on Sapphire Substrate

Haojie Li^1,2 and Yan Zhang^1、*

¹Key Laboratory of Infrared Imaging Materials and Detectors, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Haojie Li, Yan Zhang. Transmission Spectrum of Multilayer AlGaN Thin Film on Sapphire Substrate[J]. Acta Optica Sinica, 2020, 40(19): 1931002

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Paper Information

Category: Thin Films

Received: May. 21, 2020

Accepted: Jun. 23, 2020

Published Online: Sep. 19, 2020

The Author Email: Zhang Yan (zhangyan@mail.sitp.ac.cn)

DOI:10.3788/AOS202040.1931002

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