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Piezoelectrics & Acoustooptics, Volume. 45, Issue 1, 21(2023)

Finite Element Simulation Analysis of Edge Load FBAR Resonators

LIU Hongbin1, ZHANG Tielin1, HU Han1, YI Xinyan1,2, and LI Guoqiang1,2
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    [1] [1] RUBY R.Micromachined cellular filters［J］.IEEE MTT-S International Microwave Symposium Digest,1996:1149-1152.

    [2] [2] KAITILA J,YLILAMMI M,ELLA J,et al.Spurious resonance free bulk acoustic wave resonators［C］//［S.l.］:IEEE Symposium on Ultrasonics,2003:84-87.

    [6] [6] RUBY R C,LARSON J D,FAZZIO R S.Performance degradation effects in FBAR filters and resonators due to Lamb wave modes［C］//［S.l.］:IEEE Ultrasonics Symposium,2005:1832-1835.

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    LIU Hongbin, ZHANG Tielin, HU Han, YI Xinyan, LI Guoqiang. Finite Element Simulation Analysis of Edge Load FBAR Resonators[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 21

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    Paper Information

    Received: Jun. 13, 2022

    Accepted: --

    Published Online: Apr. 7, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.01.005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology