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Piezoelectrics & Acoustooptics, Volume. 45, Issue 1, 21(2023)

Finite Element Simulation Analysis of Edge Load FBAR Resonators

LIU Hongbin1, ZHANG Tielin1, HU Han1, YI Xinyan1,2, and LI Guoqiang1,2
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    LIU Hongbin, ZHANG Tielin, HU Han, YI Xinyan, LI Guoqiang. Finite Element Simulation Analysis of Edge Load FBAR Resonators[J]. Piezoelectrics & Acoustooptics, 2023, 45(1): 21

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    Paper Information

    Received: Jun. 13, 2022

    Accepted: --

    Published Online: Apr. 7, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2023.01.005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology