[1] Sugioka K, Cheng Y. Ultrafast lasers-reliable tools for advanced materials processing[J]. Light: Science & Applications, 3, e149(2014).

[2] Fork R L, Greene B I, Shank C V. Generation of optical pulses shorter than 0.1 psec by colliding pulse mode-locking[J]. Applied Physics Letters, 38, 671-672(1981).

[3] Strickland D, Mourou G. Compression of amplified chirped optical pulses[J]. Optics Communications, 56, 219-221(1985).

[4] Ma Z C, Zhang Y L, Han B et al. Femtosecond-laser direct writing of metallic micro/nanostructures: from fabrication strategies to future applications[J]. Small Methods, 2, 1700413(2018).

[5] Liang J, Zhu L, Wang L V. Single-shot real-time femtosecond imaging of temporal focusing[J]. Light: Science & Applications, 7, 42(2018). http://www.nature.com/articles/s41377-018-0044-7

[6] van de Meugheuvel P, Koopmans B et al. Deterministic all-optical magnetization writing facilitated by non-local transfer of spin angular momentum[J]. Nature Communications, 11, 3835(2020).

[7] Chung S H, Mazur E. Surgical applications of femtosecond lasers[J]. Journal of Biophotonics, 2, 557-572(2009).

[8] Yamakawa K. Barty C P J. Ultrafast, ultrahigh-peak, and high-average power Ti: sapphire laser system and its applications[J]. IEEE Journal of Selected Topics in Quantum Electronics, 6, 658-675(2000).

[9] Wang C, Man S, Luo Z et al. Low-temperature copper bonding strategy via hierarchical microscale taper array fabricated by femtosecond laser[J]. Laser Physics Letters, 17, 036002(2020).

[10] Chanal M, Fedorov V Y, Chambonneau M et al. Crossing the threshold of ultrafast laser writing in bulk silicon[J]. Nature Communications, 8, 773(2017). http://europepmc.org/abstract/MED/28974678

[11] Zhang F, Wang C, Yin K et al. Underwater giant enhancement of broadband diffraction efficiency of surface diffraction gratings fabricated by femtosecond laser[J]. Journal of Applied Physics, 121, 243102(2017).

[12] Loesel F H, Fischer J P, Götz M H et al. Non-thermal ablation of neural tissue with femtosecond laser pulses[J]. Applied Physics B, 66, 121-128(1998).

[13] Domke M, Wick S, Laible M et al. Ultrafast dynamics of hard tissue ablation using femtosecond-lasers[J]. Journal of Biophotonics, 11, e201700373(2018).

[14] Tien A C, Backus S, Kapteyn H et al. Short-pulse laser damage in transparent materials as a function of pulse duration[J]. Physical Review Letters, 82, 3883-3886(1999). http://prola.aps.org/abstract/PRL/v82/i19/p3883_1

[15] Pan C J, Jiang L, Sun J Y et al. Ultrafast optical response and ablation mechanisms of molybdenum disulfide under intense femtosecond laser irradiation[J]. Light: Science & Applications, 9, 80(2020).

[16] Wang C, Tian Y X, Luo Z et al. Convex grid-patterned microstructures on silicon induced by femtosecond laser assisted with chemical etching[J]. Optics & Laser Technology, 119, 105663(2019).

[17] Luo Z, Duan J, Guo C. Femtosecond laser one-step direct-writing cylindrical microlens array on fused silica[J]. Optics Letters, 42, 2358-2361(2017).

[18] Li Q K, Yu Y H, Wang L et al. Sapphire-based Fresnel zone plate fabricated by femtosecond laser direct writing and wet etching[J]. IEEE Photonics Technology Letters, 28, 1290-1293(2016).

[19] Sun X Y, Zeng L, Du H F et al. Phase-shifted gratings fabricated with femtosecond laser by overlapped two types of fiber Bragg gratings[J]. Optics & Laser Technology, 124, 105969(2020).

[20] Streltsov A M, Borrelli N F. Study of femtosecond-laser-written waveguides in glasses[J]. Journal of the Optical Society of America B, 19, 2496-2504(2002).

[21] González-Rubio G, Díaz-Núñez P, Rivera A et al. Femtosecond laser reshaping yields gold nanorods with ultranarrow surface plasmon resonances[J]. Science, 358, 640-644(2017).

[22] Roth G L, Rung S, Esen C et al. Microchannels inside bulk PMMA generated by femtosecond laser using adaptive beam shaping[J]. Optics Express, 28, 5801-5811(2020). http://www.researchgate.net/publication/338696275_Microchannels_inside_bulk_PMMA_generated_by_femtosecond_laser_using_adaptive_beam_shaping

[23] Mao Y X, Pan Y, Li X et al. High-precision digital droplet pipetting enabled by a plug-and-play microfluidic pipetting chip[J]. Lab on a Chip, 18, 2720-2729(2018).

[24] Zhang F, Wang H R, Wang C et al. Direct femtosecond laser writing of inverted array for broadband antireflection in the far-infrared[J]. Optics and Lasers in Engineering, 129, 106062(2020).

[25] Ding K W, Li M, Wang C et al. Sequential evolution of colored copper surface irradiated by defocused femtosecond laser[J]. Advanced Engineering Materials, 22, 1901310(2020).

[26] Song Y X, Wang C, Dong X R et al. Controllable superhydrophobic aluminum surfaces with tunable adhesion fabricated by femtosecond laser[J]. Optics & Laser Technology, 102, 25-31(2018).

[27] Zhang J Z, Yong J L, Yang Q et al. Femtosecond laser-induced underwater superoleophobic surfaces with reversible pH-responsive wettability[J]. Langmuir: the ACS Journal of Surfaces and Colloids, 35, 3295-3301(2019). http://www.ncbi.nlm.nih.gov/pubmed/30742769

[28] Huo J L, Yong J L, Chen F et al. Trapped air-induced reversible transition between underwater superaerophilicity and superaerophobicity on the femtosecond laser-ablated superhydrophobic PTFE surfaces[J]. Advanced Materials Interfaces, 6, 1900262(2019).

[29] Ding K W, Wang C, Zheng Y et al. One-step fabrication of multifunctional fusiform hierarchical micro/nanostructures on copper by femtosecond laser[J]. Surface and Coatings Technology, 367, 244-251(2019).

[30] Wang N, Wang Y B, Shang B et al. Bioinspired one-step construction of hierarchical superhydrophobic surfaces for oil/water separation[J]. Journal of Colloid and Interface Science, 531, 300-310(2018).

[31] Tanvir Ahmmed K M, Kietzig A M. Drag reduction on laser-patterned hierarchical superhydrophobic surfaces[J]. Soft Matter, 12, 4912-4922(2016). http://www.ncbi.nlm.nih.gov/pubmed/27146256

[32] Ahmed Y S, Paiva J M. Arif A F M, et al. The effect of laser micro-scale textured tools on the tool-chip interface performance and surface integrity during austenitic stainless-steel turning[J]. Applied Surface Science, 510, 145455(2020).

[33] Ou G, Fan P X, Zhang H J et al. Large-scale hierarchical oxide nanostructures for high-performance electrocatalytic water splitting[J]. Nano Energy, 35, 207-214(2017).

[34] Stoian R, Bhuyan M K, Zhang G D et al. Ultrafast Bessel beams: advanced tools for laser materials processing[J]. Advanced Optical Technologies, 7, 165-174(2018).

[35] Duocastella M, Arnold C B. Bessel and annular beams for materials processing[J]. Laser & Photonics Reviews, 6, 607-621(2012). http://onlinelibrary.wiley.com/doi/10.1002/lpor.201100031

[36] Jiang L, Wang A D, Li B et al. Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application[J]. Light Science & Applications, 7, 17134(2018).

[37] Jia J W, Fu H B, Wang H D et al. Improvement of beam shape modification on stability of laser induced breakdown spectroscopy[J]. Chinese Journal of Lasers, 46, 0311004(2019).

[38] Wang G B. Photonic manufacturing science & technology: overview and outlook[J]. Journal of Mechanical Engineering, 47, 157-169(2011).

[39] Balling P, Schou J. Femtosecond-laser ablation dynamics of dielectrics: basics and applications for thin films[J]. Reports on Progress in Physics. Physical Society (Great Britain), 76, 036502(2013).

[40] Hernandez-Rueda J, Götte N, Siegel J et al. Nanofabrication of tailored surface structures in dielectrics using temporally shaped femtosecond-laser pulses[J]. ACS Applied Materials & Interfaces, 7, 6613-6619(2015).

[41] Zheng Y, Yao Y H, Deng L Z et al. Valence state manipulation of S m3+ ions via a phase-shaped femtosecond laser field[J]. Photonics Research, 6, 144-148(2018). http://www.opticsjournal.net/Articles/Abstract?aid=OJ1802020000900FbIeL

[42] Singh K P, Kenfack A, Rost J M et al. Control of molecular breakup by an infrared pulse and a femtosecond pulse train[J]. Physical Review A, 97, 033406(2018).

[43] Bowman R, Muller N, Zambrana-Puyalto X et al. Efficient generation of Bessel beam arrays by means of an SLM[J]. The European Physical Journal Special Topics, 199, 159-166(2011).

[44] Yang L, El-Tamer A, Hinze U et al. Two-photon polymerization of cylinder microstructures by femtosecond Bessel beams[J]. Applied Physics Letters, 105, 041110(2014).

[45] Ouadghiri-Idrissi I, Giust R, Froehly L et al. Arbitrary shaping of on-axis amplitude of femtosecond Bessel beams with a single phase-only spatial light modulator[J]. Optics Express, 24, 11495-11504(2016).

[46] Yang L, Qian D D, Xin C et al. Direct laser writing of complex microtubes using femtosecond vortex beams[J]. Applied Physics Letters, 110, 221103(2017).

[47] Ni J C, Wang C W, Zhang C C et al. Three-dimensional chiral microstructures fabricated by structured optical vortices in isotropic material[J]. Light Science & Applications, 6, e17011(2017).

[48] Kuang Z, Li J N, Edwardson S et al. Ultrafast laser beam shaping for material processing at imaging plane by geometric masks using a spatial light modulator[J]. Optics and Lasers in Engineering, 70, 1-5(2015).

[49] Li J N, Tang Y, Kuang Z et al. Multi imaging-based beam shaping for ultrafast laser-material processing using spatial light modulators[J]. Optics and Lasers in Engineering, 112, 59-67(2019).

[50] Wippermann F, Zeitner U D, Dannberg P et al. Beam homogenizers based on chirped microlens arrays[J]. Optics Express, 15, 6218-6231(2007).

[51] Salter P S, Booth M J. Addressable microlens array for parallel laser microfabrication[J]. Optics Letters, 36, 2302-2304(2011).

[52] Tsai K F, Chu S C. Generating laser output with arbitrary lateral shape by using multi-point beam superposition method in digital lasers[J]. Laser Physics, 28, 075801(2018).

[53] Shi Z Y, Zhou L Q, Zhang L C et al. Dynamic laser parallel fabrication based on multifocal array[J]. Acta Optica Sinica, 40, 1014004(2020).

[54] Luo Z, Yin K, Dong X R et al. Fabrication of parabolic cylindrical microlens array by shaped femtosecond laser[J]. Optical Materials, 78, 465-470(2018).

[55] Pan D, Cai Z, Ji S et al. Microtubes with complex cross section fabricated by C-shaped Bessel laser beam for mimicking stomata that opens and closes rapidly[J]. ACS Applied Materials & Interfaces, 10, 36369-36376(2018). http://www.ncbi.nlm.nih.gov/pubmed/30226741

[56] Xie Q, Li X W, Jiang L et al. High-aspect-ratio, high-quality microdrilling by electron density control using a femtosecond laser Bessel beam[J]. Applied Physics A, 122, 136(2016).

[57] Cheng Y, Sugioka K, Midorikawa K et al. Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser[J]. Optics Letters, 28, 55-57(2003).

[58] Liu J R, Zhang Z Y, Chang S D et al. Directly writing in fused of 1-to-N optical waveguide power splitters silica glass using a femtosecond laser[J]. Optics Communications, 253, 315-319(2005).

[59] Liu C, Zhou Z Q, Zhu T X et al. Reliable coherent optical memory based on a laser-written waveguide[J]. Optica, 7, 192-197(2020). http://arxiv.org/abs/2002.08780v1

[60] Ams M, Marshall G, Spence D et al. Slit beam shaping method for femtosecond laser direct-write fabrication of symmetric waveguides in bulk glasses[J]. Optics Express, 13, 5676-5681(2005).

[61] Sakakura M, Sawano T, Shimotsuma Y et al. Fabrication of three-dimensional 1×4 splitter waveguides inside a glass substrate with spatially phase modulated laser beam[J]. Optics Express, 18, 12136-12143(2010).

[62] Hu Y L, Chen Y H, Ma J Q et al. High-efficiency fabrication of aspheric microlens arrays by holographic femtosecond laser-induced photopolymerization[J]. Applied Physics Letters, 103, 141112(2013).

[63] Zhang F, Duan J, Zhou X et al. Broadband and wide-angle antireflective subwavelength microstructures on zinc sulfide fabricated by femtosecond laser parallel multi-beam[J]. Optics Express, 26, 34016-34030(2018). http://www.researchgate.net/publication/329664502_Broadband_and_wide-angle_antireflective_subwavelength_microstructures_on_zinc_sulfide_fabricated_by_femtosecond_laser_parallel_multi-beam

[64] Wang C, Luo Z, Duan J et al. Adjustable annular rings of periodic surface structures induced by spatially shaped femtosecond laser[J]. Laser Physics Letters, 12, 056001(2015).

[65] Wu B W, Wang C, Luo Z et al. Controllable annulus micro-nanostructures on copper fabricated by femtosecond laser with spatial doughnut distribution[J]. Chinese Optics Letters, 18, 013101(2020). http://www.opticsjournal.net/Articles/Abstract?aid=OJ2266fab9b299616d

[66] Ionin A A, Kudryashov S I, Makarov S V et al. Beam spatial profile effect on femtosecond laser surface structuring of titanium in scanning regime[J]. Applied Surface Science, 284, 634-637(2013).

[67] J J Nivas J, He S T, Song Z M et al. Femtosecond laser surface structuring of silicon with Gaussian and optical vortex beams[J]. Applied Surface Science, 418, 565-571(2017).

[68] Weiner A M. Ultrafast optical pulse shaping: a tutorial review[J]. Optics Communications, 284, 3669-3692(2011).

[69] Vaughan J C, Hornung T, Feurer T et al. Diffraction-based femtosecond pulse shaping with a two-dimensional spatial light modulator[J]. Optics Letters, 30, 323-325(2005). http://www.opticsinfobase.org/ol/abstract.cfm?id=82494

[70] Divitt S, Zhu W Q, Zhang C et al. Ultrafast optical pulse shaping using dielectric metasurfaces[J]. Science, 364, 890-894(2019).

[71] Wang A D, Jiang L, Li X W et al. Simple and robust generation of ultrafast laser pulse trains using polarization-independent parallel-aligned thin films[J]. Optics & Laser Technology, 101, 298-303(2018).

[72] Liu P J, Jiang L, Hu J et al. Etching rate enhancement by shaped femtosecond pulse train electron dynamics control for microchannels fabrication in fused silica glass[J]. Optics Letters, 38, 4613-4616(2013).

[73] Yan X, Jiang L, Li X et al. Polarization-independent etching of fused silica based on electrons dynamics control by shaped femtosecond pulse trains for microchannel fabrication[J]. Optics Letters, 39, 5240-5243(2014). http://dx.doi.org/10.1364/ol.39.005240

[74] Han W N, Jiang L, Li X W et al. Anisotropy modulations of femtosecond laser pulse induced periodic surface structures on silicon by adjusting double pulse delay[J]. Optics Express, 22, 15820-15828(2014).

[75] Liu W, Jiang L, Han W N et al. Manipulation of LIPSS orientation on silicon surfaces using orthogonally polarized femtosecond laser double-pulse trains[J]. Optics Express, 27, 9782-9793(2019).

[76] Li X, Zhang G, Jiang L et al. Production rate enhancement of size-tunable silicon nanoparticles by temporally shaping femtosecond laser pulses in ethanol[J]. Optics Express, 23, 4226-4232(2015).

[77] Garrelie F, Bourquard F, Loir A S et al. Control of femtosecond pulsed laser ablation and deposition by temporal pulse shaping[J]. Optics & Laser Technology, 78, 42-51(2016).

[78] Wang Z, Jiang L, Li X W et al. High-throughput microchannel fabrication in fused silica by temporally shaped femtosecond laser Bessel-beam-assisted chemical etching[J]. Optics Letters, 43, 98-101(2018). http://www.onacademic.com/detail/journal_1000040493893910_bfc1.html

[79] Zhu G H, van Howe J, Durst M et al. Simultaneous spatial and temporal focusing of femtosecond pulses[J]. Optics Express, 13, 2153-2159(2005).

[80] Qiao L L, Chu W, Wang Z et al. Three-dimensional microfabrication by shaped femtosecond laser pulses[J]. Acta Optica Sinica, 39, 0126012(2019).

[81] Wang P, Chu W, Li W B et al. Aberration-insensitive three-dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses[J]. Optics Letters, 43, 3485-3488(2018).

[82] Kammel R, Ackermann R, Thomas J et al. Enhancing precision in fs-laser material processing by simultaneous spatial and temporal focusing[J]. Light: Science & Applications, 3, e169(2014).

[83] He F, Xu H, Cheng Y et al. Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses[J]. Optics Letters, 35, 1106-1108(2010).

[84] Cheng W B, Liu X L, Polynkin P. Simultaneously spatially and temporally focused femtosecond vortex beams for laser micromachining[J]. Journal of the Optical Society of America B, 35, B16-B19(2018).

[85] Doñate-Buendía C, Fernández-Alonso M, Lancis J et al[J]. Overcoming the barrier of nanoparticle production by femtosecond laser ablation in liquids using simultaneous spatial and temporal focusing Photonics Research, 2019, 1249-1257.