Fig. 1. Bessel beam generated by SLM^[45]. (a) Schematic of experimental setup; (b) phase mask applied on the SLM; (c) experimentally measured Bessel beam intensity distribution

Fig. 2. Generation of femtosecond laser vortex beam^[46]. (a) Schematic of the experimental setup; (b) simulated intensity distribution in the propagation direction

Fig. 3. Five star-shape beams. Top line: the original beam pluses a binary mask to achieve a star-shape beam at A₁; Lower line: the star-shape beam pluses computer generated holograms to achieve five star-shape beams at A2[49]

Fig. 4. Experimental setup for addressable multispot micromachining^[51]

Fig. 5. Fabricated microlens array by spatially shaped femtosecond laser^[17]. (a) Focusing performance testing device; (b) cylindrical microlens array (CMLA); (c) focusing result; (d) grating structure fabricated by using CMLA

Fig. 6. Parameter adjustment of gap ring shaped light field^[55]. (a) Adjustment of center angle; (b) adjustment of diameter; (c) center angle as a function of laser power and degree of local phase modulation; (d) diameter of single-ring microstructure as a function of axicon radius

Fig. 7. Holographic femtosecond laser direct-writing technology^[62]. (a) Schematic of the experimental setup; (b) typical diffraction intensity distribution of a one-dimensional rectangular grating with the incident Gaussian beam; (c) microlens arrays with quadrangular arrangement; (d) microlens arrays with hexagonal arrangement

Fig. 8. Basic setup for Fourier transform optical pulse shaping^[68]

Fig. 9. Ultrafast optical pulse shaping using a dielectric metasurface^[70]

Fig. 10. Optical micrograph of microchannel by femtosecond laser assisted chemical etching^[72]. (a) Conventional pulses; (b) double pulses

Fig. 11. TEM images and corresponding size distribution of Si NPs prepared at different pulse delays^[76]. (a) 0 fs; (b) 100 fs; (c) 200 fs; (d) 1000 fs

Fig. 12. Nanofabrication in dielectrics using temporally shaped femtosecond laser pulses^[40]

Fig. 13. Schematic of the setup for temporally shaped femtosecond laser Bessel beam fabrication^[78]

Fig. 14. Schematic of the experimental setup based on spatiotemporal focusing technique of femtosecond laser^[81]

Fig. 15. 3D microfluidic channels fabricated by the temporal focusing technology^[83]. (a) Schematic of the setup; (b)--(i) optical micrographs of cross section of microfluidic channels