Journal of Synthetic Crystals, Volume. 54, Issue 6, 942(2025)

Effect of Cable Diameter on Growth Stability of Large-Size Czochralski Silicon Crystals

Litao ZHU, Lei LIU, Shuai YUAN*, Shenglang ZHOU, Huali ZHANG, Chen WANG, Yu GAO, Jianwei CAO, Xuegong YU, and Deren YANG*
Author Affiliations
  • State Key Lab of Silicon and Advanced Semiconductor Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou310027, China
  • show less

    The development of the Czochralski (Cz) method for growing monocrystalline silicon has facilitated the production of larger crystals. Currently, in the repetitive Cz process, the weight of final crystal in a single furnace typically reaches 600~800 kg, exceeding the engineering load limit of pulling cable in established technologies. This paper reports stability issues arising from increasing the diameter of pulling cable during equipment upgrades, along with corresponding solutions. The study reveals that the increased rigidity of the thicker cable causes seed crystal tilting, which leads to ridge line deviation under low-load conditions and elevates the risk of neck fracture under high-load conditions. Through controlled variable experiments, this work confirms that the stability issues in crystal growth after cable thickening primarily stem from seed crystal tilting. Furthermore, numerical simulation methods were employed to analyze the stress distribution mechanisms induced by seed tilting. Ultimately, stability in crystal growth was successfully restored by adding counterweights.

    Keywords
    Tools

    Get Citation

    Copy Citation Text

    Litao ZHU, Lei LIU, Shuai YUAN, Shenglang ZHOU, Huali ZHANG, Chen WANG, Yu GAO, Jianwei CAO, Xuegong YU, Deren YANG. Effect of Cable Diameter on Growth Stability of Large-Size Czochralski Silicon Crystals[J]. Journal of Synthetic Crystals, 2025, 54(6): 942

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Mar. 1, 2025

    Accepted: --

    Published Online: Jul. 8, 2025

    The Author Email: Shuai YUAN (shuaiyuan@zju.edu.cn), Deren YANG (mseyang@zju.edu.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2025.0027

    Topics