[4] [4] HUI F, LANZA M. Scanning probe microscopy for advanced nanoelectronics[J]. Nature Electronics, 2019, 2(6): 221-229.

[5] [5] CHEN J L, YU Q H, GE B, et al. A phase difference measurement method for integrated optical interferometric imagers[J]. Remote Sensing, 2023, 15(8): 2194.

[6] [6] YUAN X, XUE Y G, MIN J W, et al. High-precision gaseous flame temperature field measurement based on quadriwave-lateral shearing interferometry[J]. Optics and Lasers in Engineering, 2023, 162: 10730.

[7] [7] KHADIR S, ANDRN D, VERRE R, et al. Metasurface optical characterization using quadriwave lateral shearing interferometry[J]. ACS Photonics, 2021, 8(2): 603-613.

[10] [10] ZHONG Zh, WANG Ch, LIU L, et al. Diffraction phase microscopy using a defocus grating[J]. Journal of Modern Optics, 2022, 69(4): 219-224.

[13] [13] DAI F, TANG F, WANG X, et al. Generalized zonal wavefront reconstruction for high spatial resolution in lateral shearing interferometry[J]. Journal of the Optical Society of America, 2012, A29(9): 2038-2047.

[14] [14] LI J, TANG F, WANG X Zh, et al. Wavefront reconstruction for lateral shearing interferometry based on difference polynomial fitting[J]. Journal of Optics, 2015, 17(6): 065401.

[15] [15] PRIMOT J, GURINEAU N. Extended hartmann test based on the pseudoguiding property of a hartmann mask completed by a phase chessboard[J]. Applied Optics, 2000, 39(31): 5715-5720.

[16] [16] LING T, LIU D, YUE X M, et al. Quadriwave lateral shearing interferometer based on a randomly encoded hybrid grating[J]. Optics Letters, 2015, 40(10): 2245-2248.

[19] [19] ZHAO Z X, ZHUANG Y Y, XIAO Zh X, et al. Characterizing a liquid crystal spatial light modulator at oblique incidence angles using the self-interference method[J]. Chinese Optics Letters, 2018, 16(9): 090701.

[20] [20] KOTTLER C, DAVID C, PFEIFFER F, et al. A two-directional approach for grating based differential phase contrast imaging using hard X-rays[J]. Optics Express, 2007, 15(3): 1175-1181.

[22] [22] BAFFOU G. Quantitative phase microscopy using quadriwave lateral shearing interferometry (QLSI): Principle, terminology, algorithm and grating shadow description[J]. Journal of Physics, 2021, D54(29): 294002.