Measurement method for surface topography based on quadriwave lateral shearing interferometry

DONG Zhengqiong; HUANG Xianwen; XU Ren; ZHU Renlong; ZHOU Xiangdong; NIE Lei

doi:10.7510/jgjs.issn.1001-3806.2024.06.017

Laser Technology, Volume. 48, Issue 6, 906(2024)

Measurement method for surface topography based on quadriwave lateral shearing interferometry

DONG Zhengqiong¹, HUANG Xianwen¹, XU Ren¹, ZHU Renlong¹, ZHOU Xiangdong¹, and NIE Lei^1,2、*

¹Key Laboratory of Modern Manufacture Quality Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China

²Xiangyang Industrial Institute of Hubei University of Technonogy, Xiangyang 441100, China

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DONG Zhengqiong, HUANG Xianwen, XU Ren, ZHU Renlong, ZHOU Xiangdong, NIE Lei. Measurement method for surface topography based on quadriwave lateral shearing interferometry[J]. Laser Technology, 2024, 48(6): 906

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Paper Information

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Received: Sep. 11, 2023

Accepted: Feb. 13, 2025

Published Online: Feb. 13, 2025

The Author Email: NIE Lei (leinie@hbut.edu.cn)

DOI:10.7510/jgjs.issn.1001-3806.2024.06.017

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology