Fig. 1. SBIL system

Fig. 2. Scanning and step exposure process of SBIL

Fig. 3. Fringe phase-locking control principle

Fig. 4. Schematic diagram of the Fourier transform of D1(x)

Fig. 5. Exposure contrast versus period measurement error

Fig. 6. Schematic diagram of coarse-fine dual stage structure

Fig. 7. Block diagram of coarse-fine dual stage docking scheme

Fig. 8. Internal structure diagram of fine positioning stage

Fig. 9. System overview of fine positioning stage

Fig. 10. Three degree of freedom decoupling control block diagram of fine positioning stage

Fig. 11. Identified and fitted results of x degree of freedom model

Fig. 12. Bode diagram of open loop transfer function

Fig. 13. Positioning errors in degrees of freedom of x,y,θz with close-loop control