[1] [1] LIU Y T. Recent development of piezoelectric fast tool servo（FTS）for precision machining［J］. International Journal of Precision Engineering and Manufacturing，2024，25（4）：851-874.

[5] [5] LAI Jianhao，YU Longhuan，YUAN Lei，et al. An integrated modeling method for piezo-actuated compliant mechanisms［J］. Sensors and Actuators A：Physical，2023，364：114770.

[7] [7] APHALE S S，DEVASIA S，REZA MOHEIMANI S O. High-bandwidth control of a piezoelectric nanopositioning stage in the presence of plant uncertainties［J］. Nanotechnology，2008，19（12）：125503.

[8] [8] WU Haitao，LAI Leijie，ZHANG Liqiang，et al. Fractional order zero phase error tracking control of a novel decoupled 2-DOF compliant micro-positioning stage［J］. Journal of Micromechanics and Microengineering，2021，31（10）：105006.

[9] [9] LING Jie，FENG Zhao，CHEN Long，et al. Neural network-based iterative learning control of a piezo-driven nanopositioning stage［J］. Precision Engineering，2023，81：112-123.

[11] [11] PINHEIRO J A，DUDUCH J G. Application of a PID controller for a piezoelectric tilt stage［C］// San Sebastian：Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology，2009.

[12] [12] HUANG Weiwei，LI Linlin，LI Zhoulong，et al. Robust high-bandwidth control of nano-positioning stages with Kalman filter based extended state observer andH∞ control［J］. Review of Scientific Instruments，2021，92（6）：065003.