Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 561(2025)
Feedforward Compensation Control for Tracking-Error Estimation of the Piezoelectric-Driven Nanopositioning Stage
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DONG Youyi, JIANG Xu, ZENG Chuangjia, ZHANG Heqing, LAI Leijie. Feedforward Compensation Control for Tracking-Error Estimation of the Piezoelectric-Driven Nanopositioning Stage[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 561
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Received: Mar. 6, 2025
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Published Online: Jul. 11, 2025
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