Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 561(2025)

Feedforward Compensation Control for Tracking-Error Estimation of the Piezoelectric-Driven Nanopositioning Stage

DONG Youyi, JIANG Xu, ZENG Chuangjia, ZHANG Heqing, and LAI Leijie
Author Affiliations
  • School of Mechanical and Automotive Engineering,Shanghai University of Engineering Science,Shanghai 201620,China
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    The piezoelectric-driven nanopositioning stage encounters problems such as low damping resonance and phase lag,which significantly affect the positioning stability and trajectory tracking accuracy of the stage. To address these problems,first,this paper designs a high-performance feedback controller that includes a notch filter and PI control to effectively suppress the low damping resonant mode of the platform. Second,based on the above feedback control,a tracking-error estimation feedforward compensation control method is designed,which utilizes the sensitivity function of the feedback system to estimate the tracking error and adds it to the reference signal as feedforward compensation,further reducing the phase lag during trajectory tracking. Finally,various trajectory signal tracking experiments were conducted on the piezoelectric-driven nanopositioning stage using the designed feedback controller and tracking-error estimation feedforward compensation controller to verify the effectiveness of the algorithm. The experimental results showed that after adding the tracking-error estimation feedforward compensation,the root mean square error and maximum error of the stage decreased by more than 50%,which can effectively improve the stability and tracking accuracy of the stage.

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    DONG Youyi, JIANG Xu, ZENG Chuangjia, ZHANG Heqing, LAI Leijie. Feedforward Compensation Control for Tracking-Error Estimation of the Piezoelectric-Driven Nanopositioning Stage[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 561

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    Paper Information

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    Received: Mar. 6, 2025

    Accepted: --

    Published Online: Jul. 11, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.03.025

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