[1] [1] Wu Suyong, Long Xingwu, Yang Kaiyong. Technique to minimize the characterization deviations of optical parameters of thin films caused by ellipsometric measurement systematic errors [J]. Acta Optica Sinica, 2012, 32(6): 0631001

[2] [2] Fang Longfeng, Lin Tianxia, Huang Zuohua. New algorithm to the ellipsometric data inversion of double films [J]. Laser Technology, 2012, 36(5): 589～592

[3] [3] Li Xiaowei, Zhou Yi, Sun Lili. Determination of chemical bond of tetrahedral amorphous carbon films by an ellipsometry approach [J]. Acta Optica Sinica, 2012, 32(10): 1031005

[4] [4] Liu Wende, Chen Chi, Zhang Hang. Effect of glass substrate and surface roughness on ellipsometric measurement of silicon nitride films [J]. Chinese J. Lasers, 2012, 39(s1): s107002

[5] [5] ZhangKeqi, Yan Yixun. Method of improving accuracy of rotating analyzer ellipsometer [J]. Acta Optica Sinica, 1988, 8(3): 229～234

[6] [6] Feng Xingwei, Su Yi, Ma Hongzhou et al.. New design of angle-variable spectroscopic ellipsometer (RPA type) [J]. Acta Optica Sinica, 1995, 15(4): 492～498

[7] [7] Laurent Broch, Aotmane En Naciri, Luc Johann. Systematic errors for a Mueller matrix dual rotating compensator ellipsometer [J]. Opt. Express, 2008, 16(12): 8814～8823

[8] [8] R. M. A. Azzam, N. M. Bashara. Ellipsometry and Polarized Light [M]. Amsterdam: North Holland Publishing Co., 1988, 166

[9] [9] Ilsin An, Jaeho Lee. A single zone azimuth calibration for rotating compensator multichannel ellipsometry [J]. Jpn. J. Appl. Phys., 2003, 42(5A): 2872～2875

[10] [10] Joungchel Lee, P. I. Rovira, Ilsin An et al.. Rotating-compensator multichannel ellipsometry: applications for real time Stokes vector spectroscopy of thin film growth [J]. Rev. Sci. Instrum., 1998, 69(4): 1800～1810

[11] [11] Hiroyuki Fujiwara. Spectroscopic Ellipsometry Principles and Applications [M]. New York: John Wiley & Sons,Ltd., 2007. 90～91

[12] [12] R. Kleim, L. Kuntzler, A. El Ghemmaz. Systematic errors in rotating-compensator ellipsometry [J]. J. Opt. Soc. Am. A, 1994, 11(9): 2550～2559

[13] [13] Zhao Kaihua. New Concept Physics [M]. Beijing: Higher Education Press, 2004. 278～279