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Acta Optica Sinica, Volume. 33, Issue 4, 412002(2013)

Calibration Method for Single Wavelength Ellipsometry Using Standard Samples

Xu Peng1,2、*, Liu Tao2, Wang Linzi2, Li Guoguang2, Xiong Wei2, and Rong Jian1
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    Xu Peng, Liu Tao, Wang Linzi, Li Guoguang, Xiong Wei, Rong Jian. Calibration Method for Single Wavelength Ellipsometry Using Standard Samples[J]. Acta Optica Sinica, 2013, 33(4): 412002

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Nov. 1, 2012

    Accepted: --

    Published Online: Mar. 5, 2013

    The Author Email: Peng Xu (xupengbeijing2012@163.com)

    DOI:10.3788/aos201333.0412002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology