AEROSPACE SHANGHAI, Volume. 42, Issue 4, 53(2025)
Spurious-free SAW Resonators on 42°Y-cut LiTaO3/SiO2/α-Si/Si Substrate with Tilted IDT
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Shijia LI, Zonglin WU, Hangyu QIAN, Guomin YANG. Spurious-free SAW Resonators on 42°Y-cut LiTaO3/SiO2/α-Si/Si Substrate with Tilted IDT[J]. AEROSPACE SHANGHAI, 2025, 42(4): 53
Category: Microsystems Devices and Reliable Applications
Received: May. 28, 2025
Accepted: --
Published Online: Sep. 29, 2025
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