AEROSPACE SHANGHAI, Volume. 42, Issue 4, 53(2025)

Spurious-free SAW Resonators on 42°Y-cut LiTaO3/SiO2/α-Si/Si Substrate with Tilted IDT

Shijia LI, Zonglin WU, Hangyu QIAN, and Guomin YANG
Author Affiliations
  • School of Future Information Technology,Fudan University,Shanghai200433,China
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    Shijia LI, Zonglin WU, Hangyu QIAN, Guomin YANG. Spurious-free SAW Resonators on 42°Y-cut LiTaO3/SiO2/α-Si/Si Substrate with Tilted IDT[J]. AEROSPACE SHANGHAI, 2025, 42(4): 53

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    Paper Information

    Category: Microsystems Devices and Reliable Applications

    Received: May. 28, 2025

    Accepted: --

    Published Online: Sep. 29, 2025

    The Author Email:

    DOI:10.19328/j.cnki.2096-8655.2025.04.005

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