AEROSPACE SHANGHAI, Volume. 42, Issue 4, 53(2025)
Spurious-free SAW Resonators on 42°Y-cut LiTaO3/SiO2/α-Si/Si Substrate with Tilted IDT
Figures & Tables(4)
Fig. 1. 2D and 3D models of the SAW resonator and the top view of the 3D model
Fig. 2. Dispersion characteristics and slowness curve of the SAW resonator
Fig. 3. Top and partial enlarged views of the SEM images of two SAW resonators
Fig. 4.
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Shijia LI, Zonglin WU, Hangyu QIAN, Guomin YANG. Spurious-free SAW Resonators on 42°Y-cut LiTaO3/SiO2/α-Si/Si Substrate with Tilted IDT[J]. AEROSPACE SHANGHAI, 2025, 42(4): 53
Paper Information
Category: Microsystems Devices and Reliable Applications
Received: May. 28, 2025
Accepted: --
Published Online: Sep. 29, 2025
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