Fig. 1. Schematic of continuous polishing

Fig. 2. Distribution of sampling points on polishing pad surface. (a) Spiral distribution; (b) circle distribution; (c) radial linear distribution

Fig. 3. Straightness detection of guide

Fig. 4. Test results of straightness of guide

Fig. 5. Schematic for tilt detection of rotating axis of polishing pad

Fig. 6. Schematic of polishing pad surface shape detection

Fig. 7. Three detected actual surface shapes of polishing pad under the same conditions

Fig. 8. Structure sketch of small-tool

Fig. 9. Relative motion analysis of small-tool

Fig. 10. Simulation result of small-tool correction

Fig. 11. Radial profile comparison of polishing pad before and after correction

Fig. 12. Comparison between theoretical and experimental results