Recent Trend of High Repetition Rate Ultrashort Laser Pulse Generation and Frequency Conversion

Jiaqi Zheng; Zhenhua Cong; Zhaojun Liu; Shang Wang; Zhigang Zhao

doi:10.3788/CJL202148.1201008

Chinese Journal of Lasers, Volume. 48, Issue 12, 1201008(2021)

Recent Trend of High Repetition Rate Ultrashort Laser Pulse Generation and Frequency Conversion

Jiaqi Zheng¹, Zhenhua Cong^1,2, Zhaojun Liu^1,2, Shang Wang², and Zhigang Zhao^1,2,3、*

Author Affiliations

¹School of Information Science and Engineering, Shandong University, Qingdao, Shandong 266237, China

²Shandong Provincial Key Laboratory of Laser Technologies and Applications, Qingdao, Shandong 266237, China

³State Key Laboratory of Quantum Optics and Quantum Optics Devices, Shanxi University, Taiyuan, Shanxi 0 30006, China

show less

Abstract Get PDF(in Chinese)

Figures & Tables(28)

Fig. 1. Schematic diagram of Kerr lens mode-locked cavity^[25]. (a) Bow-tie ring cavity; (b) proposed compact linear cavity structure

Download full size

Fig. 2. Schematic diagram of 3.5 GHz laser repetition rate multiplier^[29]

Download full size

Fig. 3. Schematic diagram of fiber ring cavity filter device with dispersion compensation^[31]

Download full size

Fig. 4. Schematic of active fiber loop^[33]

Download full size

Fig. 5. Schematic of pulse trains envelope shaping in active fiber loop^[33]

Download full size

Fig. 6. Schematic diagram of GHz NIR and GHz DUV laser generation

Download full size

Fig. 7. Schematic of 3 GHz 257 nm DUV laser^[90]

Download full size

Fig. 8. Schematic of 14 W 266 nm DUV laser^[94]

Download full size

Fig. 9. Schematic diagram of 20 W 258 nm DUV laser^[93]

Download full size

Fig. 10. Schematic diagram of GHz 258 nm DUV laser^[98]

Download full size

Fig. 11. Current status of DUV lasers at 258 nm and 266 nm (repetition rate-energy)

Download full size

Fig. 12. Current status of DUV lasers at 258 nm and 266 nm (repetition rate-average power)

Download full size

Fig. 13. Schematic diagram for principle of FiHG “1+4”. o light is ordinary light, e light is extraordinary light

Download full size

Fig. 14. Schematic diagram for principle of FiHG “2+3”. o light is ordinary light, e light is extraordinary light and DWWP is dual wavelength wave plate

Download full size

Fig. 15. Current status of DUV lasers at 206 nm and 213 nm (repetition rate-energy)

Download full size

Fig. 16. Current status of DUV lasers at 206 nm and 213 nm (repetition rate-average power)

Download full size

Fig. 17. Schematic diagram of 2.5 W 206 nm DUV laser^[115]

Download full size

Fig. 18. Characterization of 2.5 W 206 nm DUV laser sum-frequency generation output at 2 W average power^[115]. (a) Cross-correlation signal of 4ω and 1ω beams; (b) output power versus crystal angle θ-offset; (c) spectrum of output laser

Download full size

Fig. 19. Schematic diagram of 1.37 W 213 nm DUV laser^[116]

Download full size

Fig. 20. Schematic diagram of 1.1 GHz 208.8 nm DUV laser^[118]

Download full size

Fig. 21. Schematic diagram of 1 W 193 nm DUV laser^[129]

Download full size

Table 1. Research progresses of 1 μm band GHz repetition rate lasers^{[30, 36, 42, 44-51]}

View table

Table 1. Research progresses of 1 μm band GHz repetition rate lasers^{[30, 36, 42, 44-51]}

Year	Wavelength /nm	Pulse width	Output power /W	Repetition rate /GHz	Ref. No.
2010	1050	180 fs	20	1.30	[44]
2011	1050	130 fs	5	1.6	[45]
2012	1040	890 fs	110	1.3	[46]
2014	1050	300fs	72	1.6	[47]
2018	1030	800 fs-2ps	20	1-18	[48]
2018	1030	/	100	1.76	[49]
2019	1030	480 fs	100	0.87	[50]
2020	1057	473 fs	108	1.2	[51]
2020	1057	868 fs	130	1.2	[42]
2020	1030	310 fs	100	3.52	[30]
2020	1030	233 fs	97	1.08	[36]

Table 2. Properties of common nonlinear optical crystals^[53-59]

View table

Table 2. Properties of common nonlinear optical crystals^[53-59]

Crystal	LBO	BBO	CLBO	KABO	KBBF	RBBF
Lattice structure	orthorhombic system	trigonal system	tetragonal system	trigonal system	trigonal system	trigonal system
Space group	Pna2₁	R3C	/	P321	R32	R32
Point group	mm2	/	/	/	/	/
Lattice constant /(10^-10 m)	$\begin{array}{l} a = 8.4473 \\ b = 7.3788 \\ c = 5.1395 \end{array}$	$\begin{array}{l} a = 12.532 \\ b = 12.532 \end{array}$	$\begin{array}{l} a = 10.494 \\ b = 10.494 \\ c = 8.939 \end{array}$	$\begin{array}{l} a = 8.53 \\ b = 8.53 \\ c = 8.409 \end{array}$	$\begin{array}{l} a = 4.427 \\ b = 4.427 \\ c = 20.356 \end{array}$	$\begin{array}{l} a = 4.4341 \\ b = 4.4341 \\ c = 19.758 \end{array}$
Unit numbers in cell	z=2	z=6	z=4	/	/	/
Melting point /℃	834	1095	844.5	1109	1030	1030
Mohs hardness	6	4	4	5.5-6.5	2.66	2.66
Mass density /(g·cm^-3)	2.47	3.85	2.45	2.47	2.41	2.40
Hygroscopicity	low	low	high	low	low	low
Wavelength range /nm	160-2600	189-3500	180-2750	180-3600	155-3660	160-3550

Table 3. Research progress of 258 nm and 266 nm nanosecond DUV lasers^[60-82]

View table

Table 3. Research progress of 258 nm and 266 nm nanosecond DUV lasers^[60-82]

Year	Fundamental wavelength /nm	Fundamental power /W	Output wavelength /nm	Output power	Pulse width /ns	Repetition rate	Ref. No.
2000	532	106	266	20.5 W	80	10 kHz	[60]
2000	1064	01.22	266	63 mW	32	12.5 kHz	[61]
2001	532	40	266	12 W	70	1 kHz	[62]
2002	1064	7	266	2.1 W	22	5 kHz	[63]
2002	1064	00.32	266	69 mW	00.97	3.7 kHz	[64]
2002	1064	08.74	266	196 mW	12	18 kHz	[65]
2003	1547	3.1	258	800 mW	1	200 kHz	[66]
2003	532	200	266	40 W	80	7 kHz	[67]
2006	532	120	266	28.4 W	80	10 kHz	[68]
2009	1064	81	266	14.8 W	10	100 kHz	[69]
2009	1064	52	266	1.9 W	120	7.5 kHz	[70]
2009	1031	40	258	14 W	1	5 MHz	[71]
2010	1064	14.30	266	374 mW	5	20 kHz	[72]
2010	1064	2.4	266	289 mW	59.80	20 kHz	[73]
2011	1064	22	266	2.1 W	100	5 kHz	[74]
2011	1064	80	266	5.05 W	22.50	65 kHz	[75]
2012	1064	150	266	3 W	10	10 kHz	[76]
2013	1064	18.80	266	1.82 W	16	30 kHz	[77]
2013	1030	22	258	3.2 W	15	30 kHz	[78]
2016	1064	24.50	266	3.3 W	1.5	1 MHz	[79]
2016	1064	10	266	1.85 W	1.7	20 kHz	[80]
2016	1030	3.6	258	1.1 W	2.5	14.5 kHz	[81]
2017	1030	35	258	10.5 W	3	10 kHz	[82]

Table 4. Research progress of 258 nm and 266 nm picosecond DUV lasers^[83-94]

View table

Table 4. Research progress of 258 nm and 266 nm picosecond DUV lasers^[83-94]

Year	Fundamental wavelength /nm	Fundamental power /W	Output wavelength /nm	Output power	Pulse width /ps	Repetition rate	Ref. No.
2000	1064	27.4	266	4.5 W	7	82 MHz	[83]
2011	1064	22	266	0.93 W	25	78 MHz	[84]
2013	1064	15	266	4.5 W	72	100 kHz	[85]
2015	1030	27.4	258	2.74 W	8.4	1 kHz	[86]
2015	1064	20	266	2.9 W	20	80 MHz	[87]
2016	1030	60	258	6 W	4	100 kHz	[88]
2018	1064	34	266	1.6 W	25	80 MHz	[89]
2018	1030	10	257	3 mW	1.8	3 GHz	[90]
2019	1030	33	258	7.6 W	1.5	77 kHz	[91]
2019	1064	260	266	50.1 W	15	1 MHz	[92]
2020	1030	270	258	20 W	1.2	10 kHz	[93]
2020	1064	/	266	14 W	13	200 kHz	[94]

Table 5. Research progress of 258 nm and 266 nm femtosecond DUV lasers^[95-98]

View table

Table 5. Research progress of 258 nm and 266 nm femtosecond DUV lasers^[95-98]

Year	Fundamental wavelength /nm	Fundamental power /W	Output wavelength /nm	Output power	Pulse width /fs	Repetition rate	Ref. No.
2010	1030	11.5	259	1 W	262	100 MHz	[95]
2017	1030	40	258	4.6 W	150	796 kHz	[96]
2019	1064	04.8	266	616 mW	260	78 MHz	[97]
2020	1030	10.4	258	523 mW	500	11.48 GHz	[98]

Table 6. Research progress of 206 nm and 213 nm DUV lasers^{[63-64, 83, 88, 91, 99-117]}

View table

Table 6. Research progress of 206 nm and 213 nm DUV lasers^{[63-64, 83, 88, 91, 99-117]}

Year	Fundamental wavelength /nm	Fundamental power /W	Output wavelength /nm	Output power	Pulse width	Repetition rate	Ref. No.
1979	1064	2.5	213	2 mW	80 ns	4 kHz	[99]
1995	1064	6	213	400 mW	37 ns	7 kHz	[100]
1995	1064	4	213	31 mW	20 ns	20 kHz	[101]
1996	1064	10	213	560 mW	1.5 ns	200 Hz	[102]
1996	1064	22	213	2.3 W	7 ns	10 Hz	[103]
1997	1064	47	213	4 W	3 ns	100 Hz	[104]
1997	1064	6.4	213	0.5 W	17.9 ns	7 kHz	[105]
1998	1064	02.13	213	100 mW	/	1 kHz	[106]
1999	1064	4	213	75 mW	7 ns	10 Hz	[107]
1999	1064	1	213	115mW	/	5 Hz	[108]
1999	1064	4	213	280 mW	1.8 ns	20 Hz	[108]
2000	1064	27.40	213	1.15 W	7 ps	82 MHz	[83]
2002	1064	7	213	540 mW	/	5 kHz	[63]
2002	1064	00.32	213	18 mW	/	3.7 kHz	[64]
2003	1064	7	213	2 W	/	5 kHz	[109]
2003	1047	15	205	250 mW	/	100 MHz	[110]
2005	1064	7	213	0.7 W	7 ns	20 Hz	[111]
2007	1064	395	213	10.2 W	/	10 kHz	[112]
2015	1064	/	213	100 mW	15 ns	30 kHz	[113]
2016	1030	60	206	0.8 W	4 ps	100 kHz	[88]
2019	1064	24	213	0.5 W	40 ps	120 MHz	[114]
2019	1030	80	206	1 W	1.5 ps	77 kHz	[91]
2020	1030	65	206	2.5 W	1.6 ps	100 kHz	[115]
2020	1064	30	213	1.37 W	17 ps	1 MHz	[116]
2020	1064	10.50	213	61 mW	690 ps	5 MHz	[117]

Table 7. Research progress of 193 nm DUV lasers^{[66, 125-132]}

View table

Table 7. Research progress of 193 nm DUV lasers^{[66, 125-132]}

Year	Pump wavelength (NIR) /nm	Pump wavelength (DUV) /nm	Output power	Pulse width	Repetition rate	Ref. No.
1994	774	258	0.8 mW	170 fs	1 kHz	[125]
2003	1547	221	140 mW	1 ns	200 kHz	[66]
2003	2074	213	3 mW	3.5 ns	4 Hz	[126]
2003	1064	235.8	200 mW	/	10 kHz	[127]
2007	708.6	266	35 mW	15 ns	5 kHz	[128]
2011	1107	234.3	11.6 mW	/	CW	[129]
2014	1342	224	240 mW	12.2 ns	10 kHz	[130]
2015	1553	221	310 mW	10 ns	6 kHz	[131]
2017	1553	221	1.02 W	3 ns	10 kHz	[132]

Tools

Get Citation

Copy Citation Text

Jiaqi Zheng, Zhenhua Cong, Zhaojun Liu, Shang Wang, Zhigang Zhao. Recent Trend of High Repetition Rate Ultrashort Laser Pulse Generation and Frequency Conversion[J]. Chinese Journal of Lasers, 2021, 48(12): 1201008

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: laser devices and laser physics

Received: Feb. 23, 2021

Accepted: Apr. 12, 2021

Published Online: Jun. 7, 2021

The Author Email: Zhao Zhigang (zhigang@sdu.edu.cn)

DOI:10.3788/CJL202148.1201008

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Research progresses of 1 μm band GHz repetition rate lasers[30, 36, 42, 44-51]

Table 1. Research progresses of 1 μm band GHz repetition rate lasers[30, 36, 42, 44-51]

Table 2. Properties of common nonlinear optical crystals[53-59]

Table 2. Properties of common nonlinear optical crystals[53-59]

Table 3. Research progress of 258 nm and 266 nm nanosecond DUV lasers[60-82]

Table 3. Research progress of 258 nm and 266 nm nanosecond DUV lasers[60-82]

Table 4. Research progress of 258 nm and 266 nm picosecond DUV lasers[83-94]

Table 4. Research progress of 258 nm and 266 nm picosecond DUV lasers[83-94]

Table 5. Research progress of 258 nm and 266 nm femtosecond DUV lasers[95-98]

Table 5. Research progress of 258 nm and 266 nm femtosecond DUV lasers[95-98]

Table 6. Research progress of 206 nm and 213 nm DUV lasers[63-64, 83, 88, 91, 99-117]

Table 6. Research progress of 206 nm and 213 nm DUV lasers[63-64, 83, 88, 91, 99-117]

Table 7. Research progress of 193 nm DUV lasers[66, 125-132]

Table 7. Research progress of 193 nm DUV lasers[66, 125-132]

Table 1. Research progresses of 1 μm band GHz repetition rate lasers^{[30, 36, 42, 44-51]}

Table 1. Research progresses of 1 μm band GHz repetition rate lasers^{[30, 36, 42, 44-51]}

Table 2. Properties of common nonlinear optical crystals^[53-59]

Table 2. Properties of common nonlinear optical crystals^[53-59]

Table 3. Research progress of 258 nm and 266 nm nanosecond DUV lasers^[60-82]

Table 3. Research progress of 258 nm and 266 nm nanosecond DUV lasers^[60-82]

Table 4. Research progress of 258 nm and 266 nm picosecond DUV lasers^[83-94]

Table 4. Research progress of 258 nm and 266 nm picosecond DUV lasers^[83-94]

Table 5. Research progress of 258 nm and 266 nm femtosecond DUV lasers^[95-98]

Table 5. Research progress of 258 nm and 266 nm femtosecond DUV lasers^[95-98]

Table 6. Research progress of 206 nm and 213 nm DUV lasers^{[63-64, 83, 88, 91, 99-117]}

Table 6. Research progress of 206 nm and 213 nm DUV lasers^{[63-64, 83, 88, 91, 99-117]}

Table 7. Research progress of 193 nm DUV lasers^{[66, 125-132]}

Table 7. Research progress of 193 nm DUV lasers^{[66, 125-132]}