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Laser & Optoelectronics Progress, Volume. 59, Issue 9, 0922019(2022)

Ultraprecision Grating Positioning Technology for Wafer Stage of Lithography Machine

Junhao Zhu1, Shengtong Wang1, and Xinghui Li1,2、*
Author Affiliations
  • 1Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, Guangdong , China
  • 2Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, Guangdong , China
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    Article index updated: Sep. 6, 2025

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    Junhao Zhu, Shengtong Wang, Xinghui Li. Ultraprecision Grating Positioning Technology for Wafer Stage of Lithography Machine[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922019

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Mar. 28, 2022

    Accepted: Apr. 15, 2022

    Published Online: May. 10, 2022

    The Author Email: Xinghui Li (li.xinghui@sz.tsinghua.edu.cn)

    DOI:10.3788/LOP202259.0922019

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology