Infrared and Laser Engineering, Volume. 51, Issue 7, 20220050(2022)

Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy

Chao Zhang1,2, Qun Yuan3, Jiale Zhang3, Yi Ji2, Zhishan Gao3、*, and Junhua Yan1
Author Affiliations
  • 1Academy of Astronautics, Nanjing University of Aeronautics and Astronautics, Nanjing 210006, China
  • 2Key Laboratory for Advanced Optical Remote Sensing Technology of Beijing, Beijing Institute of Space Mechanics & Electricity, Beijing 100094, China
  • 3School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
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    References(16)

    [1] [1] Schmit J, Creath K, Wyant J C. Surface Profilers, Multiple Wavelength, White Light Interferometry [M]. 3rd ed. US: Wiley, 2007: 667–755.

    [2] de Groot P. Principles of interference microscopy for the measurement of surface topography[J]. Advanced Optics Photonics, 7, 1-65(2015).

    [3] Sandoz P. An algorithm for profilometry by white-light phase shifting interferometry[J]. Journal of Modern Optics, 43, 1545-1554(1996).

    [4] Larkin K G. Efficient nonlinear algorithm for envelope detection in white light interferometry[J]. Journal of Optical Society of America A, 13, 832-843(1996).

    [5] Ma S, Quan C, Zhu R, et al. Micro-profile measurement based on windowed Fourier transform in white-light scanning interferometry[J]. Optics Communications, 284, 2488-2493(2011).

    [6] de Groot P, Deck L. Surface profiling by analysis of white-light interferograms in the spatial frequency domain[J]. Journal of Modern Optics, 42(2), 389-401(1995).

    [7] Wang J, Chen L. Measurement of micro-displacement using white-light interference based on a spatial frequency domain algorithm[J]. Infrared and Laser Engineering, 37, 874-877(2008).

    [8] Deng Q, Tang Y, Zhou Y, et al. High-resolution surface topography measurement based on frequency-domain analysis in white light interferometry[J]. Chinese Journal of Lasers, 45, 0604001(2018).

    [9] [9] Montgomery P C, Salzenstein F, Montaner D, et al. Implementation of a fringe visibility based algithm in coherence scanning interferometry f surface roughness measurement [C]Proc SPIE, 2013, 8788: 87883G.

    [10] Han Z, Chen L. Eight-step phase shifting alorithm for broadband light interferometry insensitive to envelop variation and phase shifitng error[J]. Infrared and Laser Engineering, 44, 1236-1242(2015).

    [11] [11] Dong Chen. Highdefinition verticalscan interferometry, US: US11473447[P].20060623.

    [12] Creath K. Calibration of numerical aperture effects in interferometric microscope objectives[J]. Applied Optics, 28, 3333-3338(1989).

    [13] Sheppard C J R, Larkin K G. Effect of numerical aperture on interference fringe spacing[J]. Applied Optics, 34(22), 4731-4734(1995).

    [14] Dubois A, Selb J, Vabre L, et al. Phase measurements with wide-aperture interferometers[J]. Applied Optics, 39(14), 2326-2331(2000).

    [15] de Groot P. Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window[J]. Applied Optics, 34(22), 4723-4730(1995).

    [16] Phillion D W. General methods for generation phase-shifting interferometry algorithms[J]. Applied Optics, 36(31), 8098-8115(1997).

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    Chao Zhang, Qun Yuan, Jiale Zhang, Yi Ji, Zhishan Gao, Junhua Yan. Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy[J]. Infrared and Laser Engineering, 2022, 51(7): 20220050

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    Paper Information

    Category: Photoelectric measurement

    Received: Nov. 20, 2021

    Accepted: Mar. 25, 2022

    Published Online: Dec. 20, 2022

    The Author Email:

    DOI:10.3788/IRLA20220050

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