Infrared and Laser Engineering, Volume. 51, Issue 7, 20220050(2022)
Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy
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Chao Zhang, Qun Yuan, Jiale Zhang, Yi Ji, Zhishan Gao, Junhua Yan. Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy[J]. Infrared and Laser Engineering, 2022, 51(7): 20220050
Category: Photoelectric measurement
Received: Nov. 20, 2021
Accepted: Mar. 25, 2022
Published Online: Dec. 20, 2022
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