Infrared and Laser Engineering, Volume. 51, Issue 7, 20220050(2022)

Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy

Chao Zhang1,2, Qun Yuan3, Jiale Zhang3, Yi Ji2, Zhishan Gao3、*, and Junhua Yan1
Author Affiliations
  • 1Academy of Astronautics, Nanjing University of Aeronautics and Astronautics, Nanjing 210006, China
  • 2Key Laboratory for Advanced Optical Remote Sensing Technology of Beijing, Beijing Institute of Space Mechanics & Electricity, Beijing 100094, China
  • 3School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
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    Figures & Tables(9)
    Schematic diagram of the tomography measurement schemes of the step height utilizing white light interferometric microscopy
    Schematic diagram of tomography height retrieve from the corrlogram based on vertical scanning phase-shifting
    NA effect of the Mirau type interference microscope. (a) Effective NA; (b) OPD
    Step profile measurement utilizing the PSI algorithms. (a) Step with 100 nm height; (b) Interferogram; (c) Measured profile utilizing 7-frame algorithm; (d) Measured error utilizing 7-frame algorithm; (e) Measured profile utilizing 4M-frame algorithm; (f) Measured error utilizing 4M-frame algorithm
    Photos and figures of the step height standard
    Calculated topography of the step height standard using 20× interferometric microscopy (4M-frame method)
    Calculated topography of the step height standard using 50× interferometric microscopy (4M-frame method)
    • Table 1. Parameters for simulation analysis of PSI algorithms

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      Table 1. Parameters for simulation analysis of PSI algorithms

      H/nm λ0/nm Δλ/nm γCσ/nm
      10056020010.8-1.270
    • Table 2. Calculation results of step height with different scanning interval

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      Table 2. Calculation results of step height with different scanning interval

      σH
      4M-frame method/nm 7-frame method/nm
      0.9×λ0/8 459.2455.8
      0.95×λ0/8 458.8454.4
      λ0/8 460.4454.7
      1.05×λ0/8 459.6453.3
      1.1×λ0/8 459.4453.9
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    Chao Zhang, Qun Yuan, Jiale Zhang, Yi Ji, Zhishan Gao, Junhua Yan. Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy[J]. Infrared and Laser Engineering, 2022, 51(7): 20220050

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    Paper Information

    Category: Photoelectric measurement

    Received: Nov. 20, 2021

    Accepted: Mar. 25, 2022

    Published Online: Dec. 20, 2022

    The Author Email:

    DOI:10.3788/IRLA20220050

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