Infrared and Laser Engineering, Volume. 51, Issue 7, 20220050(2022)
Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy
Fig. 1. Schematic diagram of the tomography measurement schemes of the step height utilizing white light interferometric microscopy
Fig. 2. Schematic diagram of tomography height retrieve from the corrlogram based on vertical scanning phase-shifting
Fig. 3.
Fig. 4. Step profile measurement utilizing the PSI algorithms. (a) Step with 100 nm height; (b) Interferogram; (c) Measured profile utilizing 7-frame algorithm; (d) Measured error utilizing 7-frame algorithm; (e) Measured profile utilizing 4
Fig. 6. Calculated topography of the step height standard using 20× interferometric microscopy (4
Fig. 7. Calculated topography of the step height standard using 50× interferometric microscopy (4
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Chao Zhang, Qun Yuan, Jiale Zhang, Yi Ji, Zhishan Gao, Junhua Yan. Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy[J]. Infrared and Laser Engineering, 2022, 51(7): 20220050
Category: Photoelectric measurement
Received: Nov. 20, 2021
Accepted: Mar. 25, 2022
Published Online: Dec. 20, 2022
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