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Chinese Optics Letters, Volume. 21, Issue 10, 101201(2023)

Nanometer-scale displacement measurement based on an orthogonal dual Michelson interferometer

Ju Wang, Ziheng Cai, Jinlong Yu*, Hao Luo, and Chuang Ma
Author Affiliations
  • School of Electrical and Information Engineering, Tianjin University, Tianjin 300072, China
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    Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.
    The article is cited by 3 article(s) from Web of Science.
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    Ju Wang, Ziheng Cai, Jinlong Yu, Hao Luo, Chuang Ma, "Nanometer-scale displacement measurement based on an orthogonal dual Michelson interferometer," Chin. Opt. Lett. 21, 101201 (2023)

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    Paper Information

    Category: Instrumentation, Measurement, and Optical Sensing

    Received: Mar. 10, 2023

    Accepted: May. 11, 2023

    Posted: May. 12, 2023

    Published Online: Aug. 28, 2023

    The Author Email: Jinlong Yu (yujinlong@tju.edu.cn)

    DOI:10.3788/COL202321.101201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology