[1] [1] ZHANG A,ZHA Y,ZHANG J, A surface acoustic wave micropump to pump fluids from a droplet into a closed microchannel using evaporation and capillary effects[J]. Aip Advances,2014,4(12):885-895,

[3] [3] WANG J T,YANG Z G,LIU Y,et al, The effect of surface wettability on the performance of a piezoelectric membrane pump[J]. AIP Advances,2018,8(4):045010,

[5] [5] WANG Y N,FU L M, Micropumps and biomedical applications:A review[J]. Microelectronic Engineering,2018,195:121-138,

[7] [7] LIU C,ZHU Y, Simulation and experimentalstudy of direct spray type piezoelectric air pumps based onsynthetic jet[J]. Microsystem Technologies,2019,25:4445-4454,

[8] [8] BHARAMBE J T,MOGAL P W,PATIL S, Characterizat on of piezoelectric micro pum［C］//Hinjawadi,Pune,India: 2016 International Conference on Automatic Control and Dynamic Optimization Techniques (ICACDOT) IEEE,2016:490- 495,

[9] [9] MORADI-DASTJERDI R,MEGUID S A,AHMADI S R, Dynamic behavior of novel nanocomposite diaphragm in piezoelectrically-actuated micropump[J]. Smart Materials and Structures,2019,28(10):105022,

[10] [10] MA H K,CHEN R H,HSU Y H, Development of a piezoelectric-driven miniature pump for biomedical applications[J]. Sensors & Actuators A: Physical,2015,234:23-33,