Piezoelectrics & Acoustooptics, Volume. 44, Issue 2, 264(2022)
Research on the Influence of Pump Chamber Structure Parameters on the Performance of Piezoelectric Gas Diaphragm Pumps
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HE Chunshan, LI Shenfang, LIU Jinlong, LIN Jiaying, HOU Jun, TIAN Xiaochao. Research on the Influence of Pump Chamber Structure Parameters on the Performance of Piezoelectric Gas Diaphragm Pumps[J]. Piezoelectrics & Acoustooptics, 2022, 44(2): 264
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Received: Nov. 29, 2021
Accepted: --
Published Online: Jun. 14, 2022
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