Fabrication and photo-response of monolithic 90° hybrid-photodetector array chip for QPSK detection

Han Ye; Qin Han; Shuai Wang; Feng Xiao; Fan Xiao; Yimiao Chu; Liyan Geng

doi:10.3788/COL202321.011301

Chinese Optics Letters, Volume. 21, Issue 1, 011301(2023)

Fabrication and photo-response of monolithic 90° hybrid-photodetector array chip for QPSK detection

Han Ye^1,2、*, Qin Han^1,2,3, Shuai Wang¹, Feng Xiao^1,4, Fan Xiao^1,4, Yimiao Chu^1,4, and Liyan Geng¹

¹State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

⁴College of Materials Science and Optoelectronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China

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Han Ye, Qin Han, Shuai Wang, Feng Xiao, Fan Xiao, Yimiao Chu, Liyan Geng, "Fabrication and photo-response of monolithic 90° hybrid-photodetector array chip for QPSK detection," Chin. Opt. Lett. 21, 011301 (2023)

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Paper Information

Category: Integrated Optics

Received: Jan. 5, 2022

Accepted: Jul. 22, 2022

Posted: Jul. 22, 2022

Published Online: Sep. 20, 2022

The Author Email: Han Ye (yeh@semi.ac.cn)

DOI:10.3788/COL202321.011301

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